Wafer FAB exhaust management strategies

Abstract

Many wafer fabs have exhaust management challenges, which includes point-of-use (POU) abatement device decisions. Initially it is important to summarize general rules for exhaust management and POU abatement devices in a wafer fab, which can assist when developing solutions. Wafer fabs that have a fab exhaust management strategy provide a consistent approach to selecting best POU abatement devices and determining exhaust management practices. The fab exhaust management strategy is used to develop a process-specific exhaust management plan