A. T. A. D. De Silva, D. D. De Silva, K. D. C. J. Perera, A. M. B. Priyashantha, L. L. Ruwan Sampath, P. Darshan, W. Jayathilaka, Y. Amarasinghe
{"title":"A novel MEMS motor based on thermal actuation","authors":"A. T. A. D. De Silva, D. D. De Silva, K. D. C. J. Perera, A. M. B. Priyashantha, L. L. Ruwan Sampath, P. Darshan, W. Jayathilaka, Y. Amarasinghe","doi":"10.1109/MERCON.2016.7480114","DOIUrl":null,"url":null,"abstract":"It is essential for the Micro Electro Mechanical Systems (MEMS) research industry to introduce novel concepts of micro motors to overcome problems in existing micro motors. This paper propose a novel concept of a micro motor using kink actuators and reciprocating rack and pinion assembly. Design details of the reciprocating rack and pinion is discussed in the paper. A detailed analysis of structural, transient, thermal, electrical properties was performed using the COMSOL software is also discussed. Finally a fabrication method is purposed using electron beam lithography and ultraviolet lithography.","PeriodicalId":184790,"journal":{"name":"2016 Moratuwa Engineering Research Conference (MERCon)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-04-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 Moratuwa Engineering Research Conference (MERCon)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MERCON.2016.7480114","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
It is essential for the Micro Electro Mechanical Systems (MEMS) research industry to introduce novel concepts of micro motors to overcome problems in existing micro motors. This paper propose a novel concept of a micro motor using kink actuators and reciprocating rack and pinion assembly. Design details of the reciprocating rack and pinion is discussed in the paper. A detailed analysis of structural, transient, thermal, electrical properties was performed using the COMSOL software is also discussed. Finally a fabrication method is purposed using electron beam lithography and ultraviolet lithography.
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