M. Fontaine, E. Joubert, O. Latry, C. Gauthier, C. Regard, H. Polaert, P. Eudeline, M. Ketata
{"title":"Simultaneous measures of temperature and expansion on electronic compound","authors":"M. Fontaine, E. Joubert, O. Latry, C. Gauthier, C. Regard, H. Polaert, P. Eudeline, M. Ketata","doi":"10.1109/STHERM.2011.5767201","DOIUrl":null,"url":null,"abstract":"In this paper is presented a new approach for measuring physical values of micro-electronic compounds. Indeed an optical system is used to quantify simultaneously surface temperature and expansion of a component. This is done with a Michelson interferometer. To compare the method, the measured temperature was correlated with two other methods, IR camera and ESD diode.","PeriodicalId":128077,"journal":{"name":"2011 27th Annual IEEE Semiconductor Thermal Measurement and Management Symposium","volume":"31 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-03-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 27th Annual IEEE Semiconductor Thermal Measurement and Management Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/STHERM.2011.5767201","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
In this paper is presented a new approach for measuring physical values of micro-electronic compounds. Indeed an optical system is used to quantify simultaneously surface temperature and expansion of a component. This is done with a Michelson interferometer. To compare the method, the measured temperature was correlated with two other methods, IR camera and ESD diode.
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