Lan Shen, Doo-hwan Kim, Bonggi Min, Z. Gu, Chinho Park
{"title":"Preparation of anodic aluminum oxide nano-template using Al/Si substrate for large area LED applications","authors":"Lan Shen, Doo-hwan Kim, Bonggi Min, Z. Gu, Chinho Park","doi":"10.1109/OMEMS.2010.5672133","DOIUrl":null,"url":null,"abstract":"Anodic aluminum oxide (AAO) nano-templates were prepared using the Al/Si substrates with the thickness of the aluminum films of about 500 nm. The pores of various sizes and depths were fabricated electrochemically through anodic oxidation. The optimum morphological structure for large area InGaN LED applications was formed by adjusting the applied potential, temperature, types of acid solution and their concentration. Scanning electron microscopy (SEM) investigations showed that hexagonal-close-packed nanopore arrays have smooth wall morphologies and well-defined diameters corresponding to the diameter of the applied template.","PeriodicalId":421895,"journal":{"name":"2010 International Conference on Optical MEMS and Nanophotonics","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 International Conference on Optical MEMS and Nanophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2010.5672133","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Anodic aluminum oxide (AAO) nano-templates were prepared using the Al/Si substrates with the thickness of the aluminum films of about 500 nm. The pores of various sizes and depths were fabricated electrochemically through anodic oxidation. The optimum morphological structure for large area InGaN LED applications was formed by adjusting the applied potential, temperature, types of acid solution and their concentration. Scanning electron microscopy (SEM) investigations showed that hexagonal-close-packed nanopore arrays have smooth wall morphologies and well-defined diameters corresponding to the diameter of the applied template.
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