Influence of microstructure parameters and magnetic intensity on flexible pressure sensor with variable stiffness

Abstract

This paper systematically studies the Influence of microstructure parameters and magnetic intensity on flexible pressure sensor with variable stiffness. As for the fabrication, we firstly fabricate the microstructure array with magnetic induction characteristic by 3D dynamic laser, and than sputter and pattern a pair of 80 nm thick Au electrodes on PET film. Finally, we package the microstructure array and PET film to get a variable stiffness flexible pressure sensor. The stiffness of the magnetically induced microstructure can be increased by applying a magnetic field. The performance of the sensor was tested under different magnetic intensity. The experimental results show that when the magnetic intensity is 0 mT, the sensor had higher sensitivity under low pressure load, but the linearity became worse with the continuous increase of pressure load. When the magnetic intensity is 250 mT, the sensitivity of the sensor decreases under low pressure load, but it had good linearity under both low and high pressure load.