S. Weber, J. Extermann, W. Noell, F. Jutzi, S. Lani, D. Kiselev, L. Bonacina, N. D. de Rooij, J. Wolf
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Abstract
We report our progress and the first optical application on the high-aspect ratio micromirror array for UV-NIR femtosecond (fs) broadband pulse shaping [1]. It is a bulk-micromachined device. capable of individually addressing 100 mirrors with a stroke of up to 3 μm using vertical comb drives in a novel. symmetrical double-spring design. The device was successfully implemented in a fs pulse shaper setup at λ0=795 nm.
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