Analysis of a SAW-BAW mutual transducer of finite length on piezoelectric substrates

B. Dulmet
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引用次数: 2

Abstract

This paper outlines the modeling of strong reciprocal couplings occurring on periodically corrugated piezoelectric substrates between SAWS (or STWs) propagating in their second stop band, i.e. with a wavelength close to the period of corrugations, and BAWs propagating either into or from the depth of substrate. The solution is classically expanded as series of Bloch functions allowing to obey periodic boundary conditions on the external surface. Those boundary conditions are actually taken into account by a simple integral method accessing the Fourier coefficients of the periodic part of effective stresses and induction on the free boundary of substrate. Treatment of piezoelectric effect is detailed together with issues regarding the effect of anisotropy, and results obtained on structures containing a finite number of gratings are briefly explained. The influence of the number of grooves on the energy conversion ratios is described.
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压电基板上有限长度SAW-BAW互换能器的分析
本文概述了周期性波纹压电衬底上发生的强互反耦合的建模,其中saw(或STWs)在其第二停止带传播,即波长接近波纹周期,baw传播到衬底深处或从衬底深处传播。该解被经典地展开为一系列允许外表面服从周期性边界条件的Bloch函数。这些边界条件实际上是通过一种简单的积分方法来考虑的,该方法获得了衬底自由边界上有效应力和感应的周期部分的傅里叶系数。详细讨论了压电效应的处理以及各向异性的影响问题,并简要解释了在包含有限数量光栅的结构上得到的结果。描述了槽数对能量转化率的影响。
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