Optimization of the transmission yield of the ion optics on a micro mass spectrometer: Simulations and experimental results

Abstract

This work shows the optimization, both by simulations and experimentally of the ion source optics of a miniaturized time-of-flight mass spectrometer. The simulations are used to speed up the experiments and make them more efficient in finding optimal working points. The experimental points agree well with simulations. The ion source is used finally as a linear micro time-of-flight mass spectrometer. Simple gas mixtures are identified efficiently using this system.