Fabrication and characterization of piezoelectric ceramic actuators with functional gradients

Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002. Pub Date : 2002-05-28 DOI:10.1109/ISAF.2002.1195935

D. Jin, Z. Meng

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引用次数: 1

Abstract

We fabricated a PZT/ZnO piezoelectric ceramic actuator with graded distribution of piezoelectric coefficient and resistivity through the thickness. There were tremendous differences of electric properties between its two sides, but these properties changed gradually in the transition region. The PZT composition was determined from authors' previous work. ZnO ceramics was tailored by adding dopants, such as Al and Mn ions, respectively. The microstructure of the sample profile and composition distribution through the thickness was examined by electron probe microanalysis, verifying the existence of gradient microstructure developed from the diffusion of Zn/sup 2+/. The resistivity of ZnO layer is more than ten magnitudes lower than that of PZT layer. This made the PZT layer be more effectively poled and suffered nearly all the driving voltage. Displacement curves of the PZT/ZnO Functionaly Gradient Piezoceramic Actuator (FGMPA) were investigated. The results show that tip displacement of the actuator is higher than that of La-PZT/Fe-PZT FGMPA for the same geometrical dimensions and applied voltage.

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具有功能梯度的压电陶瓷作动器的制作与表征

我们制作了一种压电系数和电阻率随厚度呈梯度分布的PZT/ZnO压电陶瓷驱动器。其两侧的电学性质差异很大，但这些性质在过渡区逐渐改变。PZT的组成由作者之前的工作确定。通过分别添加Al和Mn离子等掺杂剂来定制ZnO陶瓷。利用电子探针对样品剖面的微观结构和成分在厚度上的分布进行了分析，验证了Zn/sup 2+/扩散形成的梯度微观结构的存在。ZnO层的电阻率比PZT层低10个数量级以上。这使得PZT层更有效地极化和承受几乎所有的驱动电压。研究了PZT/ZnO功能梯度压电陶瓷致动器(FGMPA)的位移曲线。结果表明，在相同几何尺寸和施加电压下，执行器的尖端位移高于La-PZT/Fe-PZT FGMPA。

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Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.

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