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Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.最新文献

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Electrical properties of Er-doped BaTiO/sub 3/ ceramics for PTCR applications PTCR用掺铒BaTiO/ sub3 /陶瓷的电学性能
M. Viviani, M. T. Buscaglia, V. Buscaglia, L. Mitoseriu, A. Testino, P. Nanni
The electrical properties of Er-doped BaTiO/sub 3/ ceramics with different amounts of dopant in the range (0.25-8) at.% and with electron compensation were studied using D.C.-resistance and impedance spectroscopy (IS) measurements. The experimental results were compared with the Double Barrier Schottky theory for the description of the PTCR effect. D.C. resistance results and microstructure analyses were used to discuss the role of dopant concentration, mechanism of incorporation and cooling rate on the PTCR behaviour. Optimum processing parameters that ensure the best PTCR ratio were found. IS measurements were performed at various temperature over the whole transition range and grain boundary and bulk contributions were extracted by a non linear least squares fitting procedure. Dielectric constant and resistivity values were obtained and used to derive model parameters for different samples. Temperature dependence of total resistivity was calculated and compared to D.C. curves. The agreement is good in a large range of temperature, including the ferro-para phase transition.
在0.25 ~ 8范围内,对掺铒量不同的BaTiO/sub - 3/陶瓷的电学性能进行了研究。采用直流电阻和阻抗谱(IS)测量方法研究了电子补偿和电子补偿。实验结果与描述PTCR效应的双势垒肖特基理论进行了比较。利用直流电阻结果和微观结构分析,讨论了掺杂浓度、掺杂机理和冷却速率对PTCR性能的影响。找到了保证最佳PTCR比的最佳工艺参数。在整个转变范围内的不同温度下进行了IS测量,并通过非线性最小二乘拟合程序提取了晶界和体积贡献。得到介电常数和电阻率值,并以此推导出不同样品的模型参数。计算了总电阻率的温度依赖性,并与直流曲线进行了比较。在较大的温度范围内,包括铁-准相转变,一致性较好。
{"title":"Electrical properties of Er-doped BaTiO/sub 3/ ceramics for PTCR applications","authors":"M. Viviani, M. T. Buscaglia, V. Buscaglia, L. Mitoseriu, A. Testino, P. Nanni","doi":"10.1109/ISAF.2002.1195881","DOIUrl":"https://doi.org/10.1109/ISAF.2002.1195881","url":null,"abstract":"The electrical properties of Er-doped BaTiO/sub 3/ ceramics with different amounts of dopant in the range (0.25-8) at.% and with electron compensation were studied using D.C.-resistance and impedance spectroscopy (IS) measurements. The experimental results were compared with the Double Barrier Schottky theory for the description of the PTCR effect. D.C. resistance results and microstructure analyses were used to discuss the role of dopant concentration, mechanism of incorporation and cooling rate on the PTCR behaviour. Optimum processing parameters that ensure the best PTCR ratio were found. IS measurements were performed at various temperature over the whole transition range and grain boundary and bulk contributions were extracted by a non linear least squares fitting procedure. Dielectric constant and resistivity values were obtained and used to derive model parameters for different samples. Temperature dependence of total resistivity was calculated and compared to D.C. curves. The agreement is good in a large range of temperature, including the ferro-para phase transition.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"40 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127260923","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Thickness-dependent leakage current of (PVDF/PbTiO/sub 3/) pyroelectric bilayer thin film detectors (PVDF/PbTiO/ sub3 /)热释电双层薄膜探测器的厚度相关漏电流
M. Kao, C. Wang, Y. Chen
The novel pyroelectric infrared (IR) detectors have been fabricated using the Polyvinylidene Fluoride (PVDF)/Lead Titanate (PT) pyroelectric bilayer thin films which were deposited onto Pt(111)/SiO/sub 2//Si(100) substrates by a sol-gel process. The ceramic/polymer structure was constructed of the randomly oriented polycrystalline PT film(/spl sim/1 /spl mu/m) heated at 700/spl deg/C for 1 h and the /spl beta/-phase PVDF film crystallized at 65/spl deg/C for 2 h. The effects of PVDF thin film thickness (100/spl sim/580 nm) on the pyroelectric response of IR detectors were studied. The results show that the depositions of PVDF thin films onto the PT films will cause the leakage current (J) of the detectors decrease from 6.37 /spl times/ 10/sup -7/ A/cm/sup 2/ to 3.86 /spl times/ 10/sup -7/ A/cm/sup 2/. The specific detectivity (D*) measured at 100 Hz decreased from 2.72 /spl times/ 10/sup -7/ cm/spl middot/Hz/sup 1/2//W for detector without PVDF to 1.71 /spl times/ 10/sup -7/ cm/spl middot/Hz/sup 1/2//W for detector with PVDF thickness of 580 nm. By optimizing the ratio of the specific detectivity (D*) to leakage current, D*/J, the detector with PVDF thickness of 295 nm exhibits the best performance.
采用溶胶-凝胶法将聚偏氟乙烯(PVDF)/钛酸铅(PT)热释电双层薄膜沉积在PT (111)/SiO/sub 2/ Si(100)衬底上,制备了新型热释电红外(IR)探测器。将随机取向多晶PT薄膜(/spl sim/1 /spl mu/m)在700/spl℃下加热1 h, /spl β /-相PVDF薄膜在65/spl℃下结晶2 h,构建陶瓷/聚合物结构。研究了PVDF薄膜厚度(100/spl sim/580 nm)对红外探测器热释电响应的影响。结果表明,PVDF薄膜在PT薄膜上的沉积使探测器的漏电流J从6.37 /spl次/ 10/sup -7/ A/cm/sup 2/降低到3.86 /spl次/ 10/sup -7/ A/cm/sup 2/。在100 Hz下测得的比检出率(D*)由无PVDF的2.72 /spl times/ 10/sup -7/ cm/spl middot/Hz/sup 1/2//W降至PVDF厚度为580 nm的1.71 /spl times/ 10/sup -7/ cm/spl middot/Hz/sup 1/2//W。通过优化比探测率(D*)与漏电流(D* /J)的比值,得到PVDF厚度为295 nm的探测器性能最佳。
{"title":"Thickness-dependent leakage current of (PVDF/PbTiO/sub 3/) pyroelectric bilayer thin film detectors","authors":"M. Kao, C. Wang, Y. Chen","doi":"10.1109/ISAF.2002.1195885","DOIUrl":"https://doi.org/10.1109/ISAF.2002.1195885","url":null,"abstract":"The novel pyroelectric infrared (IR) detectors have been fabricated using the Polyvinylidene Fluoride (PVDF)/Lead Titanate (PT) pyroelectric bilayer thin films which were deposited onto Pt(111)/SiO/sub 2//Si(100) substrates by a sol-gel process. The ceramic/polymer structure was constructed of the randomly oriented polycrystalline PT film(/spl sim/1 /spl mu/m) heated at 700/spl deg/C for 1 h and the /spl beta/-phase PVDF film crystallized at 65/spl deg/C for 2 h. The effects of PVDF thin film thickness (100/spl sim/580 nm) on the pyroelectric response of IR detectors were studied. The results show that the depositions of PVDF thin films onto the PT films will cause the leakage current (J) of the detectors decrease from 6.37 /spl times/ 10/sup -7/ A/cm/sup 2/ to 3.86 /spl times/ 10/sup -7/ A/cm/sup 2/. The specific detectivity (D*) measured at 100 Hz decreased from 2.72 /spl times/ 10/sup -7/ cm/spl middot/Hz/sup 1/2//W for detector without PVDF to 1.71 /spl times/ 10/sup -7/ cm/spl middot/Hz/sup 1/2//W for detector with PVDF thickness of 580 nm. By optimizing the ratio of the specific detectivity (D*) to leakage current, D*/J, the detector with PVDF thickness of 295 nm exhibits the best performance.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123712918","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dielectric, elastic and piezoelectric losses of PZT ceramics in the resonance state PZT陶瓷在谐振状态下的介电、弹性和压电损耗
T. Tsurumi, H. Kakemoto, S. Wada
The material coefficients of "soft"- and "hard"-PZTs were determined as complex values by the non-linear least-squares-fitting of immittance data measured for length-extensional bar resonators. The piezoelectric d-constant should be a complex value to obtain a best fitting between observed and calculated results. As the elastic, dielectric and piezoelectric losses determined in this process were not "intrinsic" losses, calculation process to evaluate the "intrinsic" losses was proposed. It was confirmed that the intrinsic losses were smaller than the corresponding extrinsic losses. The intrinsic piezoelectric loss existed in both soft- and hard-PZTs. About 50% of the loss of piezoelectric d-constant was derived from the elastic and dielectric losses. Most notable difference between the soft- and hard-PZTs were observed in their elastic losses.
采用非线性最小二乘拟合方法对长伸杆谐振器的阻抗数据进行拟合,确定了“软”和“硬”压电陶瓷的材料系数为复数值。压电常数应该是一个复数值,以获得观测结果与计算结果的最佳拟合。由于在此过程中确定的弹性、介电和压电损耗并非“本征”损耗,因此提出了评估“本征”损耗的计算方法。结果表明,本征损耗小于相应的外在损耗。软、硬压电陶瓷均存在固有压电损耗。约50%的压电d常数损失来自于弹性和介电损耗。软质压电陶瓷和硬质压电陶瓷最显著的区别在于它们的弹性损失。
{"title":"Dielectric, elastic and piezoelectric losses of PZT ceramics in the resonance state","authors":"T. Tsurumi, H. Kakemoto, S. Wada","doi":"10.1109/ISAF.2002.1195947","DOIUrl":"https://doi.org/10.1109/ISAF.2002.1195947","url":null,"abstract":"The material coefficients of \"soft\"- and \"hard\"-PZTs were determined as complex values by the non-linear least-squares-fitting of immittance data measured for length-extensional bar resonators. The piezoelectric d-constant should be a complex value to obtain a best fitting between observed and calculated results. As the elastic, dielectric and piezoelectric losses determined in this process were not \"intrinsic\" losses, calculation process to evaluate the \"intrinsic\" losses was proposed. It was confirmed that the intrinsic losses were smaller than the corresponding extrinsic losses. The intrinsic piezoelectric loss existed in both soft- and hard-PZTs. About 50% of the loss of piezoelectric d-constant was derived from the elastic and dielectric losses. Most notable difference between the soft- and hard-PZTs were observed in their elastic losses.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127913625","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Depth profile of fixed charge in epitaxial oxide films on silicon substrate for MFIS structure MFIS结构硅衬底外延氧化膜固定电荷深度分布
T. Yamada, N. Wakiya, K. Shinozaki, N. Mizutani
The depth profiles of fixed charges in heteroepitaxial SrTiO/sub 3//CeO/sub 2//yttria-stabilized zirconia(YSZ)/Si and SrTiO/sub 3//MgO/Si structures were investigated using the capacitance-voltage (C-V) measurement of the films with slanted thickness. The heterostructures with slanted thickness were fabricated by pulsed laser deposition (PLD) using in-situ masking technique. It was found that there are negative fixed charges in both films. From the equivalent oxide thickness dependence of the mid-gap voltage, it was clarified that these negative charges are located at the interface between layers and near the ultra thin layer on Si.
利用斜厚度薄膜的电容电压(C-V)测量方法,研究了SrTiO/ sub3 //CeO/ sub2 // ytria稳定氧化锆(YSZ)/Si和SrTiO/ sub3 //MgO/Si异质外延结构中固定电荷的深度分布。采用原位掩蔽技术,利用脉冲激光沉积技术(PLD)制备了具有倾斜厚度的异质结构。结果表明,两种薄膜中均存在负电荷。从中隙电压对等效氧化物厚度的依赖性来看,这些负电荷位于层间界面和Si上的超薄层附近。
{"title":"Depth profile of fixed charge in epitaxial oxide films on silicon substrate for MFIS structure","authors":"T. Yamada, N. Wakiya, K. Shinozaki, N. Mizutani","doi":"10.1109/ISAF.2002.1195894","DOIUrl":"https://doi.org/10.1109/ISAF.2002.1195894","url":null,"abstract":"The depth profiles of fixed charges in heteroepitaxial SrTiO/sub 3//CeO/sub 2//yttria-stabilized zirconia(YSZ)/Si and SrTiO/sub 3//MgO/Si structures were investigated using the capacitance-voltage (C-V) measurement of the films with slanted thickness. The heterostructures with slanted thickness were fabricated by pulsed laser deposition (PLD) using in-situ masking technique. It was found that there are negative fixed charges in both films. From the equivalent oxide thickness dependence of the mid-gap voltage, it was clarified that these negative charges are located at the interface between layers and near the ultra thin layer on Si.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123075883","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Novel numerical method to correct for both circuit distortions and passive layers effect affecting Sawyer-Tower ferroelectric thin films hysteresis measurements 采用一种新的数值方法对影响索耶-塔铁电薄膜迟滞测量的电路畸变和无源层效应进行校正
R. Bouregba, G. Poullain
A novel approach is proposed to compute the ferroelectric polarization by correcting numerically for both parasitic disturbing S-T hysteresis measurements and possible interfacial layers. This is achieved by taking into account all the charges flowing in a S-T circuit.
提出了一种计算铁电极化的新方法,通过对寄生干扰S-T滞回测量和可能的界面层进行数值校正。这是通过考虑在S-T电路中流动的所有电荷来实现的。
{"title":"Novel numerical method to correct for both circuit distortions and passive layers effect affecting Sawyer-Tower ferroelectric thin films hysteresis measurements","authors":"R. Bouregba, G. Poullain","doi":"10.1109/ISAF.2002.1195858","DOIUrl":"https://doi.org/10.1109/ISAF.2002.1195858","url":null,"abstract":"A novel approach is proposed to compute the ferroelectric polarization by correcting numerically for both parasitic disturbing S-T hysteresis measurements and possible interfacial layers. This is achieved by taking into account all the charges flowing in a S-T circuit.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"215 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122406118","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and analysis of a piezoelectric ultrasonic transducer for distance measurement 一种用于距离测量的压电超声换能器的设计与分析
Z. Gui, Xiaobing Hu, Longtu Li
This paper describes a kind of bimorph flexural piezoelectric ultrasonic transducer (abbreviated as PUT) for distance measurement. A bimorph flexural PUT based on low-sintering piezoelectric ceramics PMN-PNN-PZT, which have high piezoelectric constant (d/sub 33/>680pC/N), high electromechanical coupling factor (K/sub p/=0.70/spl sim/0.73), was introduced. The numerical and finite element analysis (abbreviated as FEA) of its resonant modes were investigated. An advanced laser scanning vibrometer has been used to measure the displacement amplitude profiles of their resonant mode. It has greatly helped us to design and analyze transducers.
本文介绍了一种用于距离测量的双晶片弯曲压电超声换能器(简称PUT)。介绍了一种基于低烧结压电陶瓷PMN-PNN-PZT的双晶片弯曲PUT材料,该材料具有高压电常数(d/sub 33/>680pC/N)和高机电耦合系数(K/sub p/=0.70/spl sim/0.73)。对其谐振模态进行了数值分析和有限元分析。采用先进的激光扫描测振仪测量了其共振模式的位移幅值分布。它极大地帮助了我们设计和分析换能器。
{"title":"Design and analysis of a piezoelectric ultrasonic transducer for distance measurement","authors":"Z. Gui, Xiaobing Hu, Longtu Li","doi":"10.1109/ISAF.2002.1195937","DOIUrl":"https://doi.org/10.1109/ISAF.2002.1195937","url":null,"abstract":"This paper describes a kind of bimorph flexural piezoelectric ultrasonic transducer (abbreviated as PUT) for distance measurement. A bimorph flexural PUT based on low-sintering piezoelectric ceramics PMN-PNN-PZT, which have high piezoelectric constant (d/sub 33/>680pC/N), high electromechanical coupling factor (K/sub p/=0.70/spl sim/0.73), was introduced. The numerical and finite element analysis (abbreviated as FEA) of its resonant modes were investigated. An advanced laser scanning vibrometer has been used to measure the displacement amplitude profiles of their resonant mode. It has greatly helped us to design and analyze transducers.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"39 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122994853","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Dielectric properties of (Ba,Sr)TiO/sub 3/ MOD films grown on various substrates 不同衬底生长(Ba,Sr)TiO/sub 3/ MOD薄膜的介电性能
I. Koutsaroff, P. Woo, L. Mcneil, M. Zelner, A. Kassam, M. Capanu, L. Chmiel, B. McClelland, A. Cervin-Lawry
(Ba/sub 0.7/SrO/sub 0.3/)TiO/sub 3/ (BST) double layer capacitors with Pt electrodes were fabricated under identical conditions on different substrates: SiO/sub 2//Si(111), r-plane sapphire, polycrystalline alumina Al/sub 2/O/sub 3/ (99.6%), Zirconia/Yttria Stabilized Alumina (ZYSA) and glazed polycrystalline alumina. The formation of the crystalline structure of BST films, grown by metal-organic decomposition (MOD) at various thermal processing conditions, leads to significant change in the dielectric properties of the BST films. By preparing BST films of the same thickness and under the same processing conditions, we observed that they possess higher capacitance when grown on all types of alumina-based substrates compared to those on SiO/sub 2//Si substrates. The higher capacitance on alumina were always associated with larger dissipation factors, and lower or similar leakage current densities. The final tuning of dielectric properties of BST double layer capacitors on non-silicon substrates was correlated to the processing conditions. Furthermore, the processing parameters and the type of lower electrode should be optimized individually for each specific substrate. The lowest achieved leakage current density of Pt/BST/Pt capacitor (500/spl times/500 /spl mu/m/sup 2/) on glazed alumina was 2.8/spl times/10/sup -9/ A/cm/sup 2/ at 200 kV/cm with capacitance per unit area of 27 fF//spl mu/m/sup 2/.
(Ba/sub 0.7/SrO/sub 0.3/)TiO/sub 3/ (BST) Pt电极双层电容器在相同条件下制备在不同衬底上:SiO/sub 2//Si(111), r面蓝宝石,多晶氧化铝Al/sub 2/O/sub 3/(99.6%),氧化锆/钇稳定氧化铝(ZYSA)和釉面多晶氧化铝。在不同的热处理条件下,金属有机分解(MOD)生长的BST薄膜的晶体结构的形成导致了BST薄膜介电性能的显著变化。通过制备相同厚度和相同工艺条件下的BST薄膜,我们观察到它们在所有类型的氧化铝基衬底上生长时比在SiO/ sub2 //Si衬底上生长时具有更高的电容。氧化铝上的电容越大,耗散系数越大,漏电流密度越低或相近。非硅衬底BST双层电容器介电性能的最终调整与工艺条件有关。此外,加工参数和下电极的类型应该针对每个特定的衬底单独优化。在釉面氧化铝上,Pt/BST/Pt电容器的最低泄漏电流密度(500/spl次/500 /spl μ m/sup 2/)在200 kV/cm时为2.8/spl次/10/sup -9/ A/cm/sup 2/,单位面积电容为27 fF//spl μ m/sup 2/。
{"title":"Dielectric properties of (Ba,Sr)TiO/sub 3/ MOD films grown on various substrates","authors":"I. Koutsaroff, P. Woo, L. Mcneil, M. Zelner, A. Kassam, M. Capanu, L. Chmiel, B. McClelland, A. Cervin-Lawry","doi":"10.1109/ISAF.2002.1195916","DOIUrl":"https://doi.org/10.1109/ISAF.2002.1195916","url":null,"abstract":"(Ba/sub 0.7/SrO/sub 0.3/)TiO/sub 3/ (BST) double layer capacitors with Pt electrodes were fabricated under identical conditions on different substrates: SiO/sub 2//Si(111), r-plane sapphire, polycrystalline alumina Al/sub 2/O/sub 3/ (99.6%), Zirconia/Yttria Stabilized Alumina (ZYSA) and glazed polycrystalline alumina. The formation of the crystalline structure of BST films, grown by metal-organic decomposition (MOD) at various thermal processing conditions, leads to significant change in the dielectric properties of the BST films. By preparing BST films of the same thickness and under the same processing conditions, we observed that they possess higher capacitance when grown on all types of alumina-based substrates compared to those on SiO/sub 2//Si substrates. The higher capacitance on alumina were always associated with larger dissipation factors, and lower or similar leakage current densities. The final tuning of dielectric properties of BST double layer capacitors on non-silicon substrates was correlated to the processing conditions. Furthermore, the processing parameters and the type of lower electrode should be optimized individually for each specific substrate. The lowest achieved leakage current density of Pt/BST/Pt capacitor (500/spl times/500 /spl mu/m/sup 2/) on glazed alumina was 2.8/spl times/10/sup -9/ A/cm/sup 2/ at 200 kV/cm with capacitance per unit area of 27 fF//spl mu/m/sup 2/.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122097552","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
New high temperature morphotropic phase boundary piezoelectric ceramics 新型高温相变相界压电陶瓷
T. Shrout, R. Eitel, C. Randall, E. Alberta, P. Rehrig
New morphotropic phase boundary (MPB) piezoelectrics with ferroelectric phase transitions (T/sub c/) exceeding that of PbZrO/sub 3/-PbTiO/sub 3/ (PZT) were investigated. Based on a perovskite tolerance factor - T/sub c/ relationship, new high T/sub c/ MPB systems were projected in Bi(Me)O/sub 3/-PbTiO/sub 3/ systems, where Me is a relatively large B/sup +3/-site cation. For the (1-x)BiScO/sub 3/-(x)PbTiO/sub 3/ solid solution, a MPB was found at x-0.64 separating the rhombohedral and tetragonal phases, with correspondingly enhanced dielectric and piezoelectric properties. A transition temperature T/sub c/ of /spl sim/450/spl deg/C was determined with higher T/sub c/s projected with lower tolerance factor systems.
研究了铁电相变(T/sub c/)超过PbZrO/sub 3/-PbTiO/sub 3/ (PZT)的新型亲晶相界(MPB)压电材料。基于钙钛矿耐受因子- T/sub - c/关系,在Bi(Me)O/sub - 3/- pbtio /sub - 3/体系中预测了新的高T/sub - c/ MPB体系,其中Me是相对较大的B/sup +3/-位阳离子。对于(1-x)BiScO/sub - 3/-(x)PbTiO/sub - 3/固溶体,在x-0.64处发现了一个MPB,分离了菱形相和四方相,相应地增强了介电和压电性能。用较低容差系数的系统投影较高的T/sub c/s,确定了转变温度T/sub c/ / / / / /450/spl deg/ c。
{"title":"New high temperature morphotropic phase boundary piezoelectric ceramics","authors":"T. Shrout, R. Eitel, C. Randall, E. Alberta, P. Rehrig","doi":"10.1109/ISAF.2002.1195923","DOIUrl":"https://doi.org/10.1109/ISAF.2002.1195923","url":null,"abstract":"New morphotropic phase boundary (MPB) piezoelectrics with ferroelectric phase transitions (T/sub c/) exceeding that of PbZrO/sub 3/-PbTiO/sub 3/ (PZT) were investigated. Based on a perovskite tolerance factor - T/sub c/ relationship, new high T/sub c/ MPB systems were projected in Bi(Me)O/sub 3/-PbTiO/sub 3/ systems, where Me is a relatively large B/sup +3/-site cation. For the (1-x)BiScO/sub 3/-(x)PbTiO/sub 3/ solid solution, a MPB was found at x-0.64 separating the rhombohedral and tetragonal phases, with correspondingly enhanced dielectric and piezoelectric properties. A transition temperature T/sub c/ of /spl sim/450/spl deg/C was determined with higher T/sub c/s projected with lower tolerance factor systems.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122155252","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Novel piezoelectric ceramic/polymer composite transducers 新型压电陶瓷/聚合物复合换能器
S. Turcu, B. Jadidian, S. Danforth, A. Safari
The design, processing conditions and electromechanical characterization of novel piezoelectric ceramic/polymer composites with 2-2 and 3-3 connectivity is presented. The ceramic structures made of PZT were prepared by Layered Manufacturing, namely by Fused Deposition of Ceramics (FDC) process. The ceramic phase in the form of fibers or sheets was oriented at different orientation angles /spl theta/ with respect to the x/sub 3/ axis of the sample, which varied between 0/spl deg/ and 75/spl deg/, in 15/spl deg/ increments. The sintered structures were placed in Spurr Epoxy polymer and diced in 2mm thickness. The electromechanical and elastic properties were investigated as a function of orientation angle /spl theta/. The longitudinal piezoelectric charge coefficient showed a decrease in the property as the /spl theta/ increases. It was found that as the orientation angle /spl theta/ was increased, the transverse piezoelectric charge coefficient d/sub 3l/ changed its sign from a negative to a positive value at /spl theta/ = 37.5/spl deg/ reaching a maximum value at 45/spl deg/ for both types of composites. Due to the contribution of a positive d/sub 3l/ coefficient, a significant increase in the hydrostatic charge coefficient was observed.
介绍了新型2-2和3-3连接型压电陶瓷/聚合物复合材料的设计、加工条件和机电特性。采用层状制造技术,即熔融沉积陶瓷(FDC)工艺制备了PZT陶瓷结构。纤维或薄片形式的陶瓷相相对于样品的x/ sub3 /轴定向在不同的取向角/spl θ /,以15/spl°/的增量在0/spl°/和75/spl°/之间变化。将烧结后的结构置于spr环氧聚合物中,切成2mm厚的小块。研究了其机电和弹性性能与取向角/spl θ /的关系。纵向压电电荷系数随/spl θ /的增大而减小。结果表明:随着取向角/spl θ /的增大,两种复合材料的横向压电电荷系数d/sub 3l/在/spl θ / = 37.5/spl°/处由负变为正,在45/spl°/处达到最大值。由于正的d/sub 3l/系数的贡献,观察到流体静压电荷系数显着增加。
{"title":"Novel piezoelectric ceramic/polymer composite transducers","authors":"S. Turcu, B. Jadidian, S. Danforth, A. Safari","doi":"10.1109/ISAF.2002.1195930","DOIUrl":"https://doi.org/10.1109/ISAF.2002.1195930","url":null,"abstract":"The design, processing conditions and electromechanical characterization of novel piezoelectric ceramic/polymer composites with 2-2 and 3-3 connectivity is presented. The ceramic structures made of PZT were prepared by Layered Manufacturing, namely by Fused Deposition of Ceramics (FDC) process. The ceramic phase in the form of fibers or sheets was oriented at different orientation angles /spl theta/ with respect to the x/sub 3/ axis of the sample, which varied between 0/spl deg/ and 75/spl deg/, in 15/spl deg/ increments. The sintered structures were placed in Spurr Epoxy polymer and diced in 2mm thickness. The electromechanical and elastic properties were investigated as a function of orientation angle /spl theta/. The longitudinal piezoelectric charge coefficient showed a decrease in the property as the /spl theta/ increases. It was found that as the orientation angle /spl theta/ was increased, the transverse piezoelectric charge coefficient d/sub 3l/ changed its sign from a negative to a positive value at /spl theta/ = 37.5/spl deg/ reaching a maximum value at 45/spl deg/ for both types of composites. Due to the contribution of a positive d/sub 3l/ coefficient, a significant increase in the hydrostatic charge coefficient was observed.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128488910","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dielectric properties of capacitor materials in the optical frequency range 电容材料在光学频率范围内的介电特性
M. Biegalski, R. Thayer, J. Nino, S. Trolier-McKinstry
The optical properties and band gaps of capacitor materials are important for a number of reasons, including assessing the viability of candidate materials for gate dielectrics in semiconductors, identifying the electronic components of the polarizability, and monitoring degradation processes. This paper reports the high frequency dielectric function of several capacitor materials in the near UV to near IR range as determined by spectroscopic ellipsometry. Spectroscopic ellipsometry was also be used to determine changes in the depth profile due to changes in the dielectric function. In this work dielectric materials, primarily strontium titanate, were examined to determine their changes during DC electric field induced degradation.
电容材料的光学特性和带隙很重要,原因有很多,包括评估半导体中栅极介质候选材料的可行性,识别极化率的电子元件,以及监测降解过程。本文用椭圆偏振光谱法测定了几种电容器材料在近紫外至近红外波段的高频介电函数。利用椭偏光谱法测定了介电函数变化引起的深度分布变化。在这项工作中,研究了介电材料,主要是钛酸锶,以确定它们在直流电场诱导降解过程中的变化。
{"title":"Dielectric properties of capacitor materials in the optical frequency range","authors":"M. Biegalski, R. Thayer, J. Nino, S. Trolier-McKinstry","doi":"10.1109/ISAF.2002.1195857","DOIUrl":"https://doi.org/10.1109/ISAF.2002.1195857","url":null,"abstract":"The optical properties and band gaps of capacitor materials are important for a number of reasons, including assessing the viability of candidate materials for gate dielectrics in semiconductors, identifying the electronic components of the polarizability, and monitoring degradation processes. This paper reports the high frequency dielectric function of several capacitor materials in the near UV to near IR range as determined by spectroscopic ellipsometry. Spectroscopic ellipsometry was also be used to determine changes in the depth profile due to changes in the dielectric function. In this work dielectric materials, primarily strontium titanate, were examined to determine their changes during DC electric field induced degradation.","PeriodicalId":415725,"journal":{"name":"Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2002-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126865780","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
期刊
Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.
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