{"title":"GeSn N-FinFETs and NiGeSn contact formation by phosphorus implant","authors":"Y. Chuang, Hsien-chih Huang, Jiun-Yun Li","doi":"10.23919/SNW.2017.8242315","DOIUrl":null,"url":null,"abstract":"We report n-FinFETs with a high drive current of 108 Aim and the best SS of 138 mV/dec. A higher drive current was achieved by the reduction of series S/D resistance. NiGeSn/n<sup>+</sup>-GeSn contact formation was done by rapid thermal annealing below 400 °C. Contact resistivity was characterized by circular transmission line model. The contact resistance decreases with the carrier concentration or Sn fraction in GeSn films with the lowest contact resistivity of 3.8×10<sup>−8</sup> Ω-cm<sup>2</sup>.","PeriodicalId":424135,"journal":{"name":"2017 Silicon Nanoelectronics Workshop (SNW)","volume":"25 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 Silicon Nanoelectronics Workshop (SNW)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/SNW.2017.8242315","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
We report n-FinFETs with a high drive current of 108 Aim and the best SS of 138 mV/dec. A higher drive current was achieved by the reduction of series S/D resistance. NiGeSn/n+-GeSn contact formation was done by rapid thermal annealing below 400 °C. Contact resistivity was characterized by circular transmission line model. The contact resistance decreases with the carrier concentration or Sn fraction in GeSn films with the lowest contact resistivity of 3.8×10−8 Ω-cm2.
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