Xiaobo Tian, A. Sohn, Yu Zhang, O. Spires, Rongguang Liang
{"title":"Dual-mode snapshot interferometric system for on-machine metrology (Conference Presentation)","authors":"Xiaobo Tian, A. Sohn, Yu Zhang, O. Spires, Rongguang Liang","doi":"10.1117/12.2518689","DOIUrl":null,"url":null,"abstract":"We present a dual-mode snapshot interferometric system (DMSIS) for measuring both surface shape and surface roughness to meet the urgent need for on-machine metrology in optical fabrication. Two different modes, interferometer mode and microscopy mode, are achieved using Linnik configuration. To realize snapshot measurement, a pixelated polarization camera is used to capture four phase-shifted interferograms simultaneously. We have demonstrated its performance for off-line metrology and on-machine metrology by mounting it on a diamond turning machine.","PeriodicalId":394633,"journal":{"name":"Dimensional Optical Metrology and Inspection for Practical Applications VIII","volume":"10 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-05-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Dimensional Optical Metrology and Inspection for Practical Applications VIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2518689","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
We present a dual-mode snapshot interferometric system (DMSIS) for measuring both surface shape and surface roughness to meet the urgent need for on-machine metrology in optical fabrication. Two different modes, interferometer mode and microscopy mode, are achieved using Linnik configuration. To realize snapshot measurement, a pixelated polarization camera is used to capture four phase-shifted interferograms simultaneously. We have demonstrated its performance for off-line metrology and on-machine metrology by mounting it on a diamond turning machine.
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