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Dimensional Optical Metrology and Inspection for Practical Applications VIII最新文献

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Front Matter: Volume 10991 封面:第10991卷
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引用次数: 0
Comparing Hilbert transform profilometry and Fourier transform profilometry (Conference Presentation) 希尔伯特变换轮廓术与傅立叶变换轮廓术的比较(会议报告)
Song Zhang
Three-dimensional (3D) shape measurement methods based on fringe analysis could achieve high resolution and high accuracy. Fourier transform profilometry (FTP) uses a single fringe pattern is sufficient to recover the carrier phase for 3D shape measurement. Basically, FTP method applies Fourier transform to a fringe image and extracts the desired phase by applying a band-pass filter to obtain the desired carrier phase. Though successful, the single-pattern FTP method has the following major limitations: 1) it is sensitive to noise; 2) it is difficult to accurately measure an object surface with strong texture variations; and 3) it is difficult to measure detailed complex surface structures. To alleviate the influence of averaged background (i.e., DC) signal, the modified FTP method was proposed by taking another fringe pattern to remove DC from the fringe pattern. Even more robust, the modified FTP method still cannot achieve high accuracy for complex surface geometry or objects with strong texture. This is because to properly recover the carrier phase, FTP requires a properly designed filter to recover the carrier phase that might be polluted by surface texture or geometry. Hilbert transform, in contrast, is based on one inherent property of Hilbert transform: it shifts the phase of a sine function by $pi/2$. For a fringe pattern without DC component, the phase can be directly retrieved using Hilbert transform without filtering. This paper examines differences between these two methods and presents both simulation and experimental comparing results.
基于条纹分析的三维形状测量方法可以达到高分辨率和高精度。傅里叶变换轮廓术(FTP)使用单一条纹图案足以恢复载波相位的三维形状测量。FTP方法基本上是对条纹图像进行傅里叶变换,通过加带通滤波器提取期望的载波相位,从而得到期望的载波相位。单模式FTP方法虽然成功,但有以下主要局限性:1)对噪声敏感;2)纹理变化较大的物体表面难以精确测量;3)精细复杂的表面结构难以测量。为了减轻平均背景(即直流)信号的影响,提出了一种改进的FTP方法,即采用另一种条纹图来去除条纹图中的直流。改进后的FTP方法在鲁棒性更强的情况下,对于复杂的表面几何形状或具有较强纹理的物体,仍然无法达到较高的精度。这是因为为了正确地恢复载波相位,FTP需要一个设计合理的滤波器来恢复可能被表面纹理或几何形状污染的载波相位。相反,希尔伯特变换是基于希尔伯特变换的一个固有性质:它将正弦函数的相位移动$pi/2$。对于没有直流分量的条纹图,可以直接使用希尔伯特变换而不进行滤波。本文分析了这两种方法的差异,并给出了仿真和实验对比结果。
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引用次数: 0
Dual-mode snapshot interferometric system for on-machine metrology (Conference Presentation) 用于机器计量的双模快照干涉测量系统(会议介绍)
Xiaobo Tian, A. Sohn, Yu Zhang, O. Spires, Rongguang Liang
We present a dual-mode snapshot interferometric system (DMSIS) for measuring both surface shape and surface roughness to meet the urgent need for on-machine metrology in optical fabrication. Two different modes, interferometer mode and microscopy mode, are achieved using Linnik configuration. To realize snapshot measurement, a pixelated polarization camera is used to capture four phase-shifted interferograms simultaneously. We have demonstrated its performance for off-line metrology and on-machine metrology by mounting it on a diamond turning machine.
本文提出了一种双模快照干涉测量系统(DMSIS),用于测量表面形状和表面粗糙度,以满足光学制造中机器测量的迫切需要。两种不同的模式,干涉仪模式和显微镜模式,实现使用林尼克配置。为了实现快照测量,使用像素化偏振相机同时捕获4个相移干涉图。我们通过将其安装在金刚石车床上,演示了其离线计量和机上计量的性能。
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引用次数: 1
Benchmark measurements for additive manufacturing of metals (Conference Presentation) 金属增材制造的基准测量(会议报告)
L. Levine, B. Lane
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引用次数: 0
3D sensing for direct write error characterization for aerosol jet printing 用于气溶胶喷射打印的直接写入误差表征的3D传感
Rajesh Ramamurthy, H. Chiu, K. Harding, R. Tait
This report evaluates some of the challenges faced with 2D camera based on-machine metrology and potential options with using 3D sensors for such Direct Write applications. Specifically, in order to fully exploit 3D direct write technology to surfaces in excess of 45 degree to the print direction, non-planar motion employing 4th and 5th rotary axes are often necessary. This report will outline a procedure for doing high accuracy rotary axis calibration. Furthermore, the use of online metrology solution to enable tuning of the rotary axis as well as for online print characterization will be detailed. These efforts will provide a fresh impetus to the use of 3D sensors for on-machine monitoring applications in additive manufacturing.
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引用次数: 0
Fringe analysis based on convolutional neural networks (Conference Presentation) 基于卷积神经网络的条纹分析(会议报告)
Shijie Feng, C. Zuo, Qian Chen, G. Gu
Over the past few decades, tremendous efforts have been devoted to developing various techniques for fringe analysis, and they can be broadly classified into two categories: (1) phase-shifting (PS) methods which require multiple fringe patterns to extract phase information and (2) spatial phase demodulation methods which allow phase retrieval from a single fringe pattern, such as the Fourier transform (FT), windowed Fourier transform (WFT), and wavelet transform (WT) methods. Compared with spatial phase demodulation methods, the multiple-shot phase-shifting techniques are generally more robust and can achieve pixel-wise phase measurement with higher resolution and accuracy. Furthermore, the phase-shifting measurements are quite insensitive to non-uniform background intensity and fringe modulation. Nevertheless, due to their multi-shot nature, these methods are difficult to apply to dynamic measurements and are more susceptible to external disturbance and vibrations. Thus, for many applications, phase extraction from a single fringe pattern is desired, which falls under the purview of spatial fringe analysis. Here, we demonstrate experimentally for the first time, to our knowledge, that the use of convolutional neural networks can substantially enhance the accuracy of phase demodulation from a single fringe pattern. Deep learning is a powerful machine learning technique that employs artificial neural networks with multiple layers of increasingly richer functionality. The effectiveness of the proposed method is verified using carrier fringe patterns under the scenario of fringe projection profilometry. Experimental results demonstrate its superior performance in terms of high accuracy and edge-preserving over two representative single-frame techniques: Fourier transform profilometry and windowed Fourier profilometry.
在过去的几十年里,人们投入了巨大的努力来开发各种条纹分析技术,它们大致可以分为两类:(1)相移(PS)方法,需要多个条纹图来提取相位信息;(2)空间相位解调方法,允许从单个条纹图中提取相位,如傅里叶变换(FT)、加窗傅里叶变换(WFT)和小波变换(WT)方法。与空间相位解调方法相比,多镜头移相技术一般具有更强的鲁棒性,能够以更高的分辨率和精度实现逐像素相位测量。此外,相移测量对非均匀背景强度和条纹调制不敏感。然而,由于它们的多镜头性质,这些方法很难应用于动态测量,并且更容易受到外部干扰和振动。因此,对于许多应用来说,需要从单一条纹模式中提取相位,这属于空间条纹分析的范围。在这里,我们首次通过实验证明,据我们所知,卷积神经网络的使用可以大大提高单个条纹图的相位解调精度。深度学习是一种强大的机器学习技术,它采用具有多层日益丰富功能的人工神经网络。在条纹投影轮廓术场景下,利用载波条纹图验证了该方法的有效性。实验结果表明,该方法在高精度和边缘保持方面优于两种具有代表性的单帧傅里叶变换轮廓术和窗口傅里叶轮廓术。
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引用次数: 0
Compact snapshot freefrom null testing with adaptive optics (Conference Presentation) 带有自适应光学的紧凑快照无零测试(会议报告)
Xiaobo Tian, Hee-June Choi, A. Sohn, Yu Zhang, O. Spires, Dae Wook Kim, Rongguang Liang
We present a snapshot, adaptive null interferometric system for measuring freeform surfaces using deformable mirror as the null corrector to increase the measurement range. To compensate the wavefront for different surfaces, a computer controlled deformable mirror is used as an adaptive wavefront corrector. A deformable mirror control algorithm based on stochastic parallel gradient descent algorithm has been developed to drive the deformable mirror to null the interference fringe. Snapshot phase measurement is proposed in the optimization progress to increase the iterative speed. The surface shape of the deformable mirror is measured by a deflectometry system to calculate the shape of the surface under test.
我们提出了一种快照、自适应零干涉测量系统,用于测量自由曲面,使用可变形镜作为零校正器,以增加测量范围。为了补偿不同表面的波前,采用计算机控制的可变形镜作为自适应波前校正器。提出了一种基于随机平行梯度下降算法的变形镜控制算法,用于驱动变形镜消除干涉条纹。在优化过程中引入快照相位测量,提高迭代速度。变形镜的表面形状由挠度测量系统测量,从而计算出被测表面的形状。
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引用次数: 0
In-process imaging of morphology and temperature for laser welding and selective laser melting (Conference Presentation) 激光焊接和选择性激光熔化过程中形貌和温度成像(会议报告)
Tristan G. Fleming, Troy R. Allen, Stephen G. L. Nestor, F. Altal, J. Fraser
Directly measuring morphology and temperature changes during laser processing (such as in keyhole welding and selective laser melting) can help us to understand, optimize, and control on-the-fly the manufacturing process. Even with such great potential, the technical requirements for such an in situ metrology are high due to the fast nature of the highly localized dynamics, all the while in the presence of bright backscatter and blackbody radiation, and possible obstructions such as molten ejecta and plumes. We have demonstrated that by exploiting coherent imaging through a single-mode fiber inline with the processing lens, we can image morphology at line rates up to 312 kHz, with sufficient robustness to achieve closed loop control of the manufacturing process. Applied to metal additive manufacturing, inline coherent imaging can directly measure powder layer thickness and uniformity, and formed track roughness including the onset of balling. Inline coherent imaging measures morphology dynamics but that is only part of the story. Temperature is also key to final part quality. Standard thermal imaging exploits blackbody radiation but are plagued by the highly variable emissivity of the region of interest, making quantitative measurement challenging. We were able to exploit the same apparatus used for coherent imaging to collect surface temperature profiles. Since we spectrally resolve a wide signature, we have overcome the emissivity problem to measure absolute temperature on the micron scale during laser processing.
直接测量激光加工(如锁孔焊接和选择性激光熔化)过程中的形貌和温度变化可以帮助我们了解、优化和控制制造过程。即使具有如此巨大的潜力,由于高度局域化动力学的快速性质,一直存在明亮的后向散射和黑体辐射,以及可能的障碍物,如熔融喷射物和羽流,这种原位计量的技术要求也很高。我们已经证明,通过单模光纤与处理透镜连接,利用相干成像,我们可以以高达312 kHz的线率对形态学进行成像,具有足够的鲁棒性,可以实现制造过程的闭环控制。应用于金属增材制造,在线相干成像可以直接测量粉末层厚度和均匀性,以及形成的轨道粗糙度,包括球化的开始。内联相干成像测量形态动力学,但这只是故事的一部分。温度也是最终零件质量的关键。标准热成像利用黑体辐射,但受到感兴趣区域高度可变的发射率的困扰,使定量测量具有挑战性。我们能够利用用于相干成像的相同设备来收集表面温度曲线。由于我们在光谱上解决了宽的特征,我们克服了发射率问题,在激光加工过程中测量微米尺度的绝对温度。
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引用次数: 0
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Dimensional Optical Metrology and Inspection for Practical Applications VIII
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