An approach with electrostatic MEMS switch for environment energy harvesting

Yiguo Chen, Jiahao Zhao, Yongfeng Gao
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引用次数: 1

Abstract

A new approach is developed for environment energy harvesting based on an electrostatic MEMS switch due to its hysteresis property. A hysteresis model of the electrostatic MEMS switch is established, and theoretical and experimental results show that the hysteresis window is designable. A demo for piezoelectric energy harvesting based on the MEMS switch is designed and finished. The approach is compacted, passive and efficient, which facilitates the development of energy harvesting.
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静电MEMS开关的环境能量收集方法
利用静电MEMS开关的磁滞特性,提出了一种基于静电MEMS开关的环境能量收集方法。建立了静电MEMS开关的磁滞模型,理论和实验结果表明,磁滞窗口是可设计的。设计并完成了基于MEMS开关的压电能量采集演示。该方法紧凑、被动、高效,有利于能量收集的发展。
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