C. Comeaga, G. Ionascu, E. Manea, A. Sandu, L. Bogatu, D. Besnea
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引用次数: 4
Abstract
The paper deals with studying the mechanical structure of a bulk-micromachined silicon piezoresistive accelerometer by using FEM (Finite Element Method). The vibration modes (resonant frequencies) and sensitivity were predicted. The results of numerical simulation, validated experimentally have pointed out the influence of manufacturing process parameters on the accelerometer performance.
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