{"title":"Periodic and chaotic behaviour of the autonomous impact resonator","authors":"J. Bienstman, R. Puers, J. Vandewalle","doi":"10.1109/MEMSYS.1998.659819","DOIUrl":null,"url":null,"abstract":"This paper describes the resonance characteristics of the autonomous impact resonator, a self resonating silicon resonator consisting only of a capacitive microbridge, a resistor and a d.c.-source. Since the oscillation is based on large vibrational amplitudes and on non-linear effects, the autonomous impact oscillator exhibits periodic as well as chaotic behaviour. An electromechanical model and a general mathematical description is given. The model is experimentally verified and the results are compared with simulations. The experimental results address the influence of the d.c.-voltage, the effect of the charging and discharging resistors, the influence of air damping and of the parasitic capacitance.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"130 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"30","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1998.659819","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 30
Abstract
This paper describes the resonance characteristics of the autonomous impact resonator, a self resonating silicon resonator consisting only of a capacitive microbridge, a resistor and a d.c.-source. Since the oscillation is based on large vibrational amplitudes and on non-linear effects, the autonomous impact oscillator exhibits periodic as well as chaotic behaviour. An electromechanical model and a general mathematical description is given. The model is experimentally verified and the results are compared with simulations. The experimental results address the influence of the d.c.-voltage, the effect of the charging and discharging resistors, the influence of air damping and of the parasitic capacitance.
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