Design and FEM modeling of notch effect in gold microbeams

Abstract

This paper presents the design and modeling of the MEMS mechanical fatigue in the presence of stress raising notches. FEM models are realized to study the effect of notch geometric parameters on the stress concentration factor of the gold specimen subjected to tensile loading. Test structures with three different specimens, i.e. without notch, with single notch and with a double notch are modeled considering fabrication process constraints. Maximum axial stresses produced in the specimens and the corresponding stress concentration factors for the notched specimens are obtained using FEM modeling.