Y. Nagaura, Z. Nagaura, K. Nagaura, K. Nagato, K. Emoto, K. Imani, K. Kinoshita, S. Yokomizo, M. Nakazawa
{"title":"Single-sided grooved type or double-sided grooved type resonators manufactured by chemical etching process of two or above steps","authors":"Y. Nagaura, Z. Nagaura, K. Nagaura, K. Nagato, K. Emoto, K. Imani, K. Kinoshita, S. Yokomizo, M. Nakazawa","doi":"10.1109/FREQ.2001.956253","DOIUrl":null,"url":null,"abstract":"Novel quartz resonators of single-sided grooved type and double-sided grooved type in two steps shape are successfully manufactured by chemical etching processes.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"102 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FREQ.2001.956253","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
Novel quartz resonators of single-sided grooved type and double-sided grooved type in two steps shape are successfully manufactured by chemical etching processes.