Single-sided grooved type or double-sided grooved type resonators manufactured by chemical etching process of two or above steps

Y. Nagaura, Z. Nagaura, K. Nagaura, K. Nagato, K. Emoto, K. Imani, K. Kinoshita, S. Yokomizo, M. Nakazawa
{"title":"Single-sided grooved type or double-sided grooved type resonators manufactured by chemical etching process of two or above steps","authors":"Y. Nagaura, Z. Nagaura, K. Nagaura, K. Nagato, K. Emoto, K. Imani, K. Kinoshita, S. Yokomizo, M. Nakazawa","doi":"10.1109/FREQ.2001.956253","DOIUrl":null,"url":null,"abstract":"Novel quartz resonators of single-sided grooved type and double-sided grooved type in two steps shape are successfully manufactured by chemical etching processes.","PeriodicalId":369101,"journal":{"name":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","volume":"102 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2001 IEEE International Frequncy Control Symposium and PDA Exhibition (Cat. No.01CH37218)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FREQ.2001.956253","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4

Abstract

Novel quartz resonators of single-sided grooved type and double-sided grooved type in two steps shape are successfully manufactured by chemical etching processes.
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单面沟槽式或双面沟槽式谐振器,由两步或以上的化学蚀刻工艺制造
采用化学蚀刻工艺,成功地制造出了两阶梯形状的单面沟槽型和双面沟槽型石英谐振器。
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