A. Ming, Weibing Liu, Lingling Li, Xilong Sun, Xu Zheng, Weibing Wang, Qiu-lin Tan, J. Xiong, Dapeng Chen
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引用次数: 2
Abstract
In this work, we present a newly titanium-contained periodic amorphous carbon(a-C) composite films by magnetron sputtering process on silicon (100) substrate which has lower intrinsic compressive stress that can be used in electrical modulation pulsed MEMS infrared(IR) source for NDIR gas sensors. The fabrication process, results, performance and results analysis are then carried out.
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