{"title":"Development of a novel micro electromechanical tunable capacitor with a high tuning range","authors":"J. Zou, Chang Liu","doi":"10.1109/DRC.2000.877111","DOIUrl":null,"url":null,"abstract":"Micro electromechanical tunable capacitors have been under active development recently (Young and Boser, 1996; Young et al., 1998; Dec and Suyama, 1997; Yao et al., 1998). The advantages of integrating MEMS (microelectromechanical systems) tunable capacitors on RF integrated circuits include: (1) higher quality factor compared with IC counterparts; (2) lower interconnection- and parasitic-related loss; (3) reduced system complexity. We report a new parallel-plate tunable capacitor design with a tuning range greater than the 50% limit imposed by the pull-in effect. This new design has been validated by FEA (finite element analysis) simulation using MEMCAD 4.0.","PeriodicalId":126654,"journal":{"name":"58th DRC. Device Research Conference. Conference Digest (Cat. No.00TH8526)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-06-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"58th DRC. Device Research Conference. Conference Digest (Cat. No.00TH8526)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DRC.2000.877111","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
Micro electromechanical tunable capacitors have been under active development recently (Young and Boser, 1996; Young et al., 1998; Dec and Suyama, 1997; Yao et al., 1998). The advantages of integrating MEMS (microelectromechanical systems) tunable capacitors on RF integrated circuits include: (1) higher quality factor compared with IC counterparts; (2) lower interconnection- and parasitic-related loss; (3) reduced system complexity. We report a new parallel-plate tunable capacitor design with a tuning range greater than the 50% limit imposed by the pull-in effect. This new design has been validated by FEA (finite element analysis) simulation using MEMCAD 4.0.
微机电可调谐电容器最近得到了积极的发展(Young和Boser, 1996;Young et al.， 1998;Dec和Suyama, 1997;Yao et al.， 1998)。在射频集成电路上集成MEMS(微机电系统)可调谐电容器的优点包括:(1)与集成电路相比，具有更高的品质因数;(2)较低的互连和寄生相关损失;(3)降低了系统的复杂性。我们报告了一种新的平行板可调谐电容器的设计，其调谐范围大于50%的限制强加的拉入效应。该设计已通过MEMCAD 4.0的有限元分析仿真验证。
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