Dynamic Response Of Acoustic Delay Line For Beam Lines Of SR Lithography System

Abstract

design o f acoustic delay lines (ADL) is proposed t o protect beam lines especially and a wide aperture. Protection against a sudden rupture o f a beryllium window 3 concern in the design of beam lines. Because safety o f vacuum systems o f beam synchrotron radiation lithography relies on the strength o f a thin beryllium foil being atmospheric pressure. As exposure fields are being expanded with demands in industry year by year, the aperture size of ADLs has been increasing. Such aperture degrades the performance of the ADL seriously, because leakage gas from flows upstream dominantly through the openings o f the ADL. While the shorter beam as usual, the shorter ADLs degrade the perFormance as well. novel design o f the beam line by Sumitomo Heavy Industries (SHI), an oscillating the beam from the light source vertically on the exposure plane.[l] A Beryllium extracts the beam from vacuum area t o atmospheric area, is attached t o the end of As shown in Figure 1, The ADL consists of a pair o f double tube and forms the end line. The window is connected t o the outer tube of the ADL via a bellows tube flexibly. also connected t o the inner tube of the ADL firmly. The inner tube that has enough enveloping the beam flux oscillates with the motion of the scanning mirror by synchronized driving mechanism. The ADL has an enough length stretching from the upstream. A series o f partition walls, which consist of stationary and floating baffle