Evaluating the Impact of Process Variation on RRAMs

E. Brum, M. Fieback, T. Copetti, H. Jiayi, S. Hamdioui, F. Vargas, L. Bolzani
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引用次数: 4

Abstract

Over the last fifty years Complementary Metal Oxide Semiconductor (CMOS) technology has been scaled down, making the design of high-performance applications possible. However, there is a growing concern that device scaling will become infeasible below a certain feature size. In parallel, emerging applications present high demands regarding storage and computing capability, combined with challenging constraints. In this scenario, memristive devices have become promising candidates to replace or complement CMOS technology due to their CMOS manufacturing process compatibility, zero standby power consumption as well as high scalability and density. Despite these advantages, the implementation of high-density memories based on memristive devices poses some challenges related manufacturing process variation and consequently, to their reliability during lifetime. This paper investigates the impact of manufacturing process variation on Resistive Random Access Memories (RRAMs). In more detail, an evaluation of the RRAM's functionality when considering different levels of manufacturing process variation is performed. The obtained results show that different parameters can degrade the functionality of the RRAM cell as well as that there is a relation between the performed operating sequence and the tolerated percentage of variability. Finally, it is important to mention that understanding how process variation impacts the functionality of RRAM cells is considered essential to guarantee their reliability during lifetime, also allowing to optimize manufacturing processes.
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评价工艺变化对rram的影响
在过去的五十年中,互补金属氧化物半导体(CMOS)技术已经缩小了规模,使高性能应用的设计成为可能。然而,越来越多的人担心,在一定的特征尺寸以下,设备缩放将变得不可行的。与此同时,新兴应用程序对存储和计算能力提出了很高的要求,并结合了具有挑战性的限制。在这种情况下,忆阻器件由于其CMOS制造工艺兼容性,零待机功耗以及高可扩展性和密度而成为取代或补充CMOS技术的有希望的候选者。尽管有这些优点,但基于忆阻器件的高密度存储器的实现带来了一些与制造工艺变化相关的挑战,从而影响了它们在使用寿命期间的可靠性。研究了制造工艺变化对电阻式随机存取存储器(rram)性能的影响。更详细地说,在考虑不同层次的制造工艺变化时,对RRAM的功能进行了评估。结果表明,不同的参数会降低RRAM单元的功能,并且所执行的操作顺序与可容忍的变异性百分比之间存在关系。最后,重要的是要提到,了解工艺变化如何影响RRAM单元的功能,对于保证其使用寿命期间的可靠性至关重要,也可以优化制造工艺。
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