E. Czerwosz, E. Kowalska, M. Kozłowski, H. Wronka, F. Craciunoiu, M. Miu, A. Dinescu
{"title":"CNT film grown on nanoporous silicon","authors":"E. Czerwosz, E. Kowalska, M. Kozłowski, H. Wronka, F. Craciunoiu, M. Miu, A. Dinescu","doi":"10.1109/SMICND.2010.5650256","DOIUrl":null,"url":null,"abstract":"Results of SEM characterization of CNT film grown on nanoporous silicon (NP-Si) plate covered with 2 step PVD/CVD layer are presented. SEM studies were performed for all stages of CNT film preparation process. It was found that the size of pores in NP-Si affects the final CNT film form and adhesion.","PeriodicalId":377326,"journal":{"name":"CAS 2010 Proceedings (International Semiconductor Conference)","volume":"69 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"CAS 2010 Proceedings (International Semiconductor Conference)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2010.5650256","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
Results of SEM characterization of CNT film grown on nanoporous silicon (NP-Si) plate covered with 2 step PVD/CVD layer are presented. SEM studies were performed for all stages of CNT film preparation process. It was found that the size of pores in NP-Si affects the final CNT film form and adhesion.
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