Case study of process and design performance debugging with Digital Speed Sensor

Abstract

Using speed sensor to find out the unexpected process variation and design performance degradation is getting more and more attention. In this paper, we demonstrate the industrial case of identifying process variation, with the power of in-house developed DSS (Digital Speed Sensor). The identification result is validated by TEM (Transmission Electron Microscopy). In addition, by using DSS, we can observe how the test environment results in design performance degradation, not only during the CP (Circuit Probe) test but also the board-level test.