R. Sinitskiy, V. Dragunov, I. Rudenko, D. Koloskov, E. Dragunova
{"title":"Features of the electromechanical interactions in MEMS with a lateral displacement of non-parallel electrodes in the voltage controlled mode","authors":"R. Sinitskiy, V. Dragunov, I. Rudenko, D. Koloskov, E. Dragunova","doi":"10.17212/1727-2769-2018-4-93-109","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":448354,"journal":{"name":"Proceedings of the Russian higher school Academy of sciences","volume":"224 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the Russian higher school Academy of sciences","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.17212/1727-2769-2018-4-93-109","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}