{"title":"An electrostatic microactuator for electro-mechanical relay","authors":"M. Sakata","doi":"10.1109/MEMSYS.1989.77980","DOIUrl":null,"url":null,"abstract":"The author describes the design, the fabrication process, and the estimation of the characteristics of an electrostatic miniature relay. Its characteristics (contact force and response time) are estimated by the boundary-element method for the analysis of electrostatic fields. Problems regarding future development of the prototype and the future of microactuator technology and its applications are considered.<<ETX>>","PeriodicalId":369505,"journal":{"name":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","volume":"972 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1989-02-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"28","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1989.77980","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 28
Abstract
The author describes the design, the fabrication process, and the estimation of the characteristics of an electrostatic miniature relay. Its characteristics (contact force and response time) are estimated by the boundary-element method for the analysis of electrostatic fields. Problems regarding future development of the prototype and the future of microactuator technology and its applications are considered.<>
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