Fabrication of three-dimensional conducting nanostructures by nonlinear lithography

K. Terzaki, A. Gaidukevičiūtė, C. Reinhardt, C. Fotakis, M. Vamvakaki, M. Farsari
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Abstract

The structuring and metallization of a zirconium-containing organic-inorganic photosensitive material doped with a metal-binding monomer was reported. The silver seeding and reduction parameters were examined and two different metallization techniques, metal bath and silver plating were examined on visual results and ohmic conductivity.
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非线性光刻技术制备三维导电纳米结构
报道了掺杂金属结合单体的含锆有机-无机光敏材料的结构和金属化。考察了银的播种和还原参数,并对金属浴和镀银两种不同的金属化工艺进行了视觉效果和欧姆电导率的测试。
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