A. Tsung-Kuan, Chou, Khalil Najafi, M. Muller, L. P. Bernal, P. Washabaugh, Babak A. Parviz
{"title":"Micromachined e-jet for IC chip cooling","authors":"A. Tsung-Kuan, Chou, Khalil Najafi, M. Muller, L. P. Bernal, P. Washabaugh, Babak A. Parviz","doi":"10.1109/ISSCC.2002.992257","DOIUrl":null,"url":null,"abstract":"The authors present a micromachined acoustic ejector (MACE) chip which contains electrostatically-driven Helmholtz resonators that generate small air jets. A 1.6×1.6 cm/sup 2/ prototype contains 25 e-jets with 1 m/s measured velocity. Results show that a 15-jet device located ∼1 cm above a 100°C surface dissipates >6W/m/sup 2/ K. Future generations are being designed with higher jet velocity.","PeriodicalId":423674,"journal":{"name":"2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSCC.2002.992257","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
The authors present a micromachined acoustic ejector (MACE) chip which contains electrostatically-driven Helmholtz resonators that generate small air jets. A 1.6×1.6 cm/sup 2/ prototype contains 25 e-jets with 1 m/s measured velocity. Results show that a 15-jet device located ∼1 cm above a 100°C surface dissipates >6W/m/sup 2/ K. Future generations are being designed with higher jet velocity.
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