Focusing Electrode on Focal Spot Size and Dose by Carbon Nanotube Based Cold Cathode Electron Beam (C-Beam)

Abstract

Electron beam focusing is crucial for various vacuum electron applications such as scanning electron microscope SEM), electron beam lithography (EBL), electron beam welding (EBW) and so on. We have demonstrated high quality X-ray imaging capable cold cathode electron beam design with focusing electrode. The focal spot size (FSS) and dose characteristics were improved by our focusing electrode integrated C-beam. By optimizing, as small as 0.1 mm of fss and 11.2 % of enhanced dose were confirmed. The authors believe that our sophisticated beam design will pave for next generation X-ray techniques.