Micromachined Optical Components Integrated With Photodiode

M. Sasaki, Y. Arai, H. Takebe, K. Hane
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Abstract

Si micromachining gives new optical component intrgiated with the semiconductor drvit c. The optical component including the photodetector is i d d enabling the beam iritensity rrioriitor without additional elements. For the function of some optical components (e.g.. grating, pinhole), t he mechanical struct lire is impoi tant. Si m i c lomachining technology c dn offm t he accurate mechanical structure. In this study. we have fabricated the I iarisparent posit ion sensot. and the pinhole integrated with the photodiode
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集成光电二极管的微机械光学元件
硅微加工提供了与半导体驱动器集成的新型光学元件。包括光电探测器在内的光学元件是硅微加工,无需额外元件即可实现光束强度反射。对于某些光学元件的功能(例如…光栅(针孔),其机械结构寿命是重要的。采用精密机械加工技术,可获得精确的机械结构。在这项研究中。我们制作了隐形位置传感器。针孔与光电二极管集成在一起
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