{"title":"Micromachined Optical Components Integrated With Photodiode","authors":"M. Sasaki, Y. Arai, H. Takebe, K. Hane","doi":"10.1109/IMNC.1998.730039","DOIUrl":null,"url":null,"abstract":"Si micromachining gives new optical component intrgiated with the semiconductor drvit c. The optical component including the photodetector is i d d enabling the beam iritensity rrioriitor without additional elements. For the function of some optical components (e.g.. grating, pinhole), t he mechanical struct lire is impoi tant. Si m i c lomachining technology c dn offm t he accurate mechanical structure. In this study. we have fabricated the I iarisparent posit ion sensot. and the pinhole integrated with the photodiode","PeriodicalId":356908,"journal":{"name":"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-07-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMNC.1998.730039","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Si micromachining gives new optical component intrgiated with the semiconductor drvit c. The optical component including the photodetector is i d d enabling the beam iritensity rrioriitor without additional elements. For the function of some optical components (e.g.. grating, pinhole), t he mechanical struct lire is impoi tant. Si m i c lomachining technology c dn offm t he accurate mechanical structure. In this study. we have fabricated the I iarisparent posit ion sensot. and the pinhole integrated with the photodiode