The measurement of the operating characteristics of the piezoelectric linear motor

P. Houška, K. Šubrt
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Abstract

Contribution deal with the measurement of the operating characteristics of the piezoelectric linear motor Linear Piezo LEGS Twin 20N type LT20 and control unit PDM101 both from PiezoMotor. The data processing and evaluation was performed. The motor was tested in a vacuum environment and has been studied primarily precision of positioning (micro-positioning) under different operating conditions.
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压电直线电机工作特性的测量
贡献涉及压电直线电机linear Piezo LEGS Twin 20N型LT20和控制单元PDM101的工作特性测量,均来自PiezoMotor。进行数据处理和评价。在真空环境下对电机进行了测试,并对不同工况下的定位精度(微定位)进行了初步研究。
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