Partnering for the integration of equipment recipe services into an automated factory

Abstract

Automated control distribution and execution of equipment recipes rely on the on-line management of data and equipment support for recipe services. The factory's need for recipe management combined with a lack of mature standards have resulted in factory- and tool-specific implementations. The proprietary nature of these solutions has been expensive to develop and maintain for both factories and equipment suppliers. The release of industry standard Recipe Management definitions have sparked a partnership between MEMC (factory) and ADE (supplier) to develop a prototype that validates SEMI's Recipe Management Services standard according to specific requirements of the factory and current equipment capabilities. This partnership allows an equipment supplier to work closely with the factory in identifying and defining functional and connectivity requirements for a CIM-based Recipe Management System. This paper describes MEMC and ADE's cooperative efforts in identifying both factory and equipment requirements for the deployment of industry standard recipe management services.