{"title":"Portable micro liquid dosing system","authors":"R. Rossberg, H. Sandmaier, S. Buttgenbach","doi":"10.1109/MEMSYS.1998.659813","DOIUrl":null,"url":null,"abstract":"We are able to present a portable battery powered micro liquid dosing system, which controls the liquid flow from a pressurized reservoir to a capillary output port. The system consists of a capillary buffer volume controlled by a resonant sensor, a micromachined silicon valve driven by a piezoelectrical actuator, an electronic control system comprising of a sensor processing electronics, a DC/DC-converter for controlling the actuator and a pressurized reservoir. Components have been designed, validated each in characteristics and at last been assembled to a complete dosing system. The typical input pressure is in the range of 0 to 0.4 bar, typical flow rates are up to 0.25 mi/min at 0.22 bar.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"461 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1998.659813","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
We are able to present a portable battery powered micro liquid dosing system, which controls the liquid flow from a pressurized reservoir to a capillary output port. The system consists of a capillary buffer volume controlled by a resonant sensor, a micromachined silicon valve driven by a piezoelectrical actuator, an electronic control system comprising of a sensor processing electronics, a DC/DC-converter for controlling the actuator and a pressurized reservoir. Components have been designed, validated each in characteristics and at last been assembled to a complete dosing system. The typical input pressure is in the range of 0 to 0.4 bar, typical flow rates are up to 0.25 mi/min at 0.22 bar.
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