Qian Li, Xiaojun Liu, Zili Lei, Yi Zheng, Liangzhou Chen, Wenlong Lu
{"title":"A vertical scanning positioning system with large range and nanometer resolution for optical profiler","authors":"Qian Li, Xiaojun Liu, Zili Lei, Yi Zheng, Liangzhou Chen, Wenlong Lu","doi":"10.1117/12.2181351","DOIUrl":null,"url":null,"abstract":"Piezoelectric ceramics with a flexible hinge guide was used for fine positioning at nanometer level, while a stepping motor was used for coarse positioning with a resolution at micrometer level, and their combination helped fulfillment of vertical scanning positioning with large range and nanometer resolution. A grating sensor was used for the real-time measurement of scanning displacement for close-loop positioning control. The properties of the flexible hinge guide was analyzed using ANSYS. Experimental results indicated the performance of the system was good. The system had a good application prospect in an optical profiler for surface measurement.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"21 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Engineering Measurements and Instrumentation","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2181351","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Piezoelectric ceramics with a flexible hinge guide was used for fine positioning at nanometer level, while a stepping motor was used for coarse positioning with a resolution at micrometer level, and their combination helped fulfillment of vertical scanning positioning with large range and nanometer resolution. A grating sensor was used for the real-time measurement of scanning displacement for close-loop positioning control. The properties of the flexible hinge guide was analyzed using ANSYS. Experimental results indicated the performance of the system was good. The system had a good application prospect in an optical profiler for surface measurement.
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