Yanchao Gao, Sijin Wu, Lianqing Zhu, Lianxiang Yang
Digital speckle pattern interferometry (DSPI) is an important optical tool which is widely used in many sophisticated applications. However, a traditional DSPI system can only be used to investigate the outer surfaces which can be easily observed. Therefore, an endoscopic DSPI was proposed to detect the internal and hidden surfaces. It has a rigid or flexible endoscopic tube to allow a hidden surface being clearly imaged. A fiber-optics-based setup makes the proposed DSPI system compact and robust. The temporal phase-shifting technique is used to help precise extraction of phase distributions from speckle patterns.
{"title":"Investigation of hidden diffuse surfaces using phase-shifting endoscopic digital speckle pattern interferometry","authors":"Yanchao Gao, Sijin Wu, Lianqing Zhu, Lianxiang Yang","doi":"10.1117/12.2181384","DOIUrl":"https://doi.org/10.1117/12.2181384","url":null,"abstract":"Digital speckle pattern interferometry (DSPI) is an important optical tool which is widely used in many sophisticated applications. However, a traditional DSPI system can only be used to investigate the outer surfaces which can be easily observed. Therefore, an endoscopic DSPI was proposed to detect the internal and hidden surfaces. It has a rigid or flexible endoscopic tube to allow a hidden surface being clearly imaged. A fiber-optics-based setup makes the proposed DSPI system compact and robust. The temporal phase-shifting technique is used to help precise extraction of phase distributions from speckle patterns.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128640190","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Jiwei Tian, Yun Wang, Nan Zhou, Weirui Zhao, Weiqian Zhao
In the modern optical measurement field, the radius of curvature (ROC) is one of the fundamental parameters of optical lens. Its measurement accuracy directly affects the other optical parameters, such as focal length, aberration and so on, which significantly affect the overall performance of the optical system. To meet the demand of measurement instruments for radius of curvature (ROC) with high accuracy in the market, we develop a laser confocal radius measurement system with grating ruler. The system uses the peak point of the confocal intensity curve to precisely identify the cat-eye and confocal positions and then measure the distance between these two positions by using the grating ruler, thereby achieving the high-precision measurement for the ROC. The system has advantages of high focusing sensitivity and anti-environment disturbance ability. And the preliminary theoretical analysis and experiments show that the measuring repeatability can be up to 0.8 um, which can provide an effective way for the accurate measurement of ROC.
{"title":"Laser confocal measurement system for curvature radius of lenses based on grating ruler","authors":"Jiwei Tian, Yun Wang, Nan Zhou, Weirui Zhao, Weiqian Zhao","doi":"10.1117/12.2181193","DOIUrl":"https://doi.org/10.1117/12.2181193","url":null,"abstract":"In the modern optical measurement field, the radius of curvature (ROC) is one of the fundamental parameters of optical lens. Its measurement accuracy directly affects the other optical parameters, such as focal length, aberration and so on, which significantly affect the overall performance of the optical system. To meet the demand of measurement instruments for radius of curvature (ROC) with high accuracy in the market, we develop a laser confocal radius measurement system with grating ruler. The system uses the peak point of the confocal intensity curve to precisely identify the cat-eye and confocal positions and then measure the distance between these two positions by using the grating ruler, thereby achieving the high-precision measurement for the ROC. The system has advantages of high focusing sensitivity and anti-environment disturbance ability. And the preliminary theoretical analysis and experiments show that the measuring repeatability can be up to 0.8 um, which can provide an effective way for the accurate measurement of ROC.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"9446 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129044598","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
F. Zhou, Liping Zhou, Long Xu, Jianghong Gan, Wenlong Lu, Xiaojun Liu
A new generation system for structured light is proposed here. This light has non-diffraction characteristic and is generated based on Mach-Zehnder interferometer together with optical wedge as the main optical element, which can realize phase shift easily. Theoretical analysis and ZEMAX simulation between the wedge angle and the strip phase shift are carried out. Experimental results show that the new structured light provided by this system has properties of long focal-depth, narrow strip-width, stable spatial sinusoidal density distribution and good contrast of fringe. The phase of the fringe can be shifted by adjusting the optical wedge’s position. The new structured light generated by this system has great advantages over traditional structured light on three-dimensional surface profile measurement which shows good application prospect.
{"title":"A new method for generation of non-diffraction grating structured light with phase shift","authors":"F. Zhou, Liping Zhou, Long Xu, Jianghong Gan, Wenlong Lu, Xiaojun Liu","doi":"10.1117/12.2180931","DOIUrl":"https://doi.org/10.1117/12.2180931","url":null,"abstract":"A new generation system for structured light is proposed here. This light has non-diffraction characteristic and is generated based on Mach-Zehnder interferometer together with optical wedge as the main optical element, which can realize phase shift easily. Theoretical analysis and ZEMAX simulation between the wedge angle and the strip phase shift are carried out. Experimental results show that the new structured light provided by this system has properties of long focal-depth, narrow strip-width, stable spatial sinusoidal density distribution and good contrast of fringe. The phase of the fringe can be shifted by adjusting the optical wedge’s position. The new structured light generated by this system has great advantages over traditional structured light on three-dimensional surface profile measurement which shows good application prospect.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"9446 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129157510","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
System that will allow visual and measuring control of blades is proposed. It based on triangulation method of measurement. This method implies using of elements described below: a receiving unit, source of structured light, processing and control unit, the monitor and power supply unit. Geometrical characteristics of the system are calculated. As a result we got numbers of receiving units and sources of structured light needed to monitor blade along its entire length. Theoretical error of system measurement is calculated. It depends on distance to the object, the base between receives unit and sources of structured light, resolution and physical size of image receive. Surface of blade is not flat this fact entails changing distance from object to receive unit. So the error of measurement will be different. The interval for researching was chosen from 90 to 130 mm. Error of measurement have steady upward trend from 0,08 to 0,017 mm all period between chosen distances. The physical model of control method is developed. As a result of its working picture of illuminated metal object was obtained. The program written in MatLab processes experimental picture, find lines of structure light and calculate dislocations of it. Then use this information to make a three-dimensional model of object.
{"title":"The system of blade's shape measuring","authors":"A. A. Gorbachev, V. Korotaev, Dmitri V. Apehtin","doi":"10.1117/12.2087596","DOIUrl":"https://doi.org/10.1117/12.2087596","url":null,"abstract":"System that will allow visual and measuring control of blades is proposed. It based on triangulation method of measurement. This method implies using of elements described below: a receiving unit, source of structured light, processing and control unit, the monitor and power supply unit. Geometrical characteristics of the system are calculated. As a result we got numbers of receiving units and sources of structured light needed to monitor blade along its entire length. Theoretical error of system measurement is calculated. It depends on distance to the object, the base between receives unit and sources of structured light, resolution and physical size of image receive. Surface of blade is not flat this fact entails changing distance from object to receive unit. So the error of measurement will be different. The interval for researching was chosen from 90 to 130 mm. Error of measurement have steady upward trend from 0,08 to 0,017 mm all period between chosen distances. The physical model of control method is developed. As a result of its working picture of illuminated metal object was obtained. The program written in MatLab processes experimental picture, find lines of structure light and calculate dislocations of it. Then use this information to make a three-dimensional model of object.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"242 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124663925","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In order to detect the diameter of a wheel-set online, the diameter was detected by using a laser displacement sensor and two eddy current displacement sensors at a speed of 15km/h. The weight of the wheel -set caused extrusion of the rail and changed the original measuring position, which had severe influence on the measuring results, so the influence of the deformation of the rail is analyzed and a compensation method based on the detection of the settlement of the rail is proposed. After compensation, the errors of the results are within ±0.5mm and the standard deviation is 0.12mm. The measuring results showed that the compensation method satisfied with the need of measuring accuracy.
{"title":"Analysis of the rail's settlement on the measurement of the diameter of wheel-set","authors":"J. Tan, Shuangyun Shao, Q. Feng","doi":"10.1117/12.2083334","DOIUrl":"https://doi.org/10.1117/12.2083334","url":null,"abstract":"In order to detect the diameter of a wheel-set online, the diameter was detected by using a laser displacement sensor and two eddy current displacement sensors at a speed of 15km/h. The weight of the wheel -set caused extrusion of the rail and changed the original measuring position, which had severe influence on the measuring results, so the influence of the deformation of the rail is analyzed and a compensation method based on the detection of the settlement of the rail is proposed. After compensation, the errors of the results are within ±0.5mm and the standard deviation is 0.12mm. The measuring results showed that the compensation method satisfied with the need of measuring accuracy.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123351847","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
For high-precision machining, a convenient and accurate detection of motion error for machine tools is significant. Among common detection methods such as the ball-bar method, the laser tracker approach has received much more attention. As a high-accuracy measurement device, laser tracker is capable of long-distance and dynamic measurement, which increases much flexibility during the measurement process. However, existing methods are not so satisfactory in measurement cost, operability or applicability. Currently, a plausible method is called the single-station and time-sharing method, but it needs a large working area all around the machine tool, thus leaving itself not suitable for the machine tools surrounded by a protective cover. In this paper, a novel and convenient positioning error measurement approach by utilizing a single laser tracker is proposed, followed by two corresponding mathematical models including a laser-tracker base-point-coordinate model and a target-mirror-coordinates model. Also, an auxiliary apparatus for target mirrors to be placed on is designed, for which sensitivity analysis and Monte-Carlo simulation are conducted to optimize the dimension. Based on the method proposed, a real experiment using single API TRACKER 3 assisted by the auxiliary apparatus is carried out and a verification experiment using a traditional RENISHAW XL-80 interferometer is conducted under the same condition for comparison. Both results demonstrate a great increase in the Y-axis positioning error of machine tool. Theoretical and experimental studies together verify the feasibility of this method which has a more convenient operation and wider application in various kinds of machine tools.
{"title":"Indirect measurement of machine tool motion axis error with single laser tracker","authors":"Zhaoyong Wu, Liang Li, Z. Du","doi":"10.1117/12.2180959","DOIUrl":"https://doi.org/10.1117/12.2180959","url":null,"abstract":"For high-precision machining, a convenient and accurate detection of motion error for machine tools is significant. Among common detection methods such as the ball-bar method, the laser tracker approach has received much more attention. As a high-accuracy measurement device, laser tracker is capable of long-distance and dynamic measurement, which increases much flexibility during the measurement process. However, existing methods are not so satisfactory in measurement cost, operability or applicability. Currently, a plausible method is called the single-station and time-sharing method, but it needs a large working area all around the machine tool, thus leaving itself not suitable for the machine tools surrounded by a protective cover. In this paper, a novel and convenient positioning error measurement approach by utilizing a single laser tracker is proposed, followed by two corresponding mathematical models including a laser-tracker base-point-coordinate model and a target-mirror-coordinates model. Also, an auxiliary apparatus for target mirrors to be placed on is designed, for which sensitivity analysis and Monte-Carlo simulation are conducted to optimize the dimension. Based on the method proposed, a real experiment using single API TRACKER 3 assisted by the auxiliary apparatus is carried out and a verification experiment using a traditional RENISHAW XL-80 interferometer is conducted under the same condition for comparison. Both results demonstrate a great increase in the Y-axis positioning error of machine tool. Theoretical and experimental studies together verify the feasibility of this method which has a more convenient operation and wider application in various kinds of machine tools.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121398957","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In order to enable the output response of a precision rapid displacement system to rapidly track the input instructions, and solve the problem of excessive control amplitude in the shortest period of time, deadbeat control with constraint and non-ripple can be used to enhance the system response rate under the constraint. Simulation results show that the steady-state step signal tracking error of a system can reach ±1.5μm under random disturbance, and the step response is rapid and accurate. Compared with general control strategies, this method has a digital control design to increase the speed of response, the fine anti-disturbance ability, and the potential for wide application.
{"title":"Application of deadbeat control with constraint and non-ripple in precision rapid displacement system","authors":"Peng Li, Jiwen Cui, Jiubin Tan, Xuemei Ding","doi":"10.1117/12.2181184","DOIUrl":"https://doi.org/10.1117/12.2181184","url":null,"abstract":"In order to enable the output response of a precision rapid displacement system to rapidly track the input instructions, and solve the problem of excessive control amplitude in the shortest period of time, deadbeat control with constraint and non-ripple can be used to enhance the system response rate under the constraint. Simulation results show that the steady-state step signal tracking error of a system can reach ±1.5μm under random disturbance, and the step response is rapid and accurate. Compared with general control strategies, this method has a digital control design to increase the speed of response, the fine anti-disturbance ability, and the potential for wide application.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"150 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114749845","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In order to meet the requirement of aerodynamics, the infrared domes or windows with conformal and thin-wall structure becomes the development trend of high-speed aircrafts in the future. But these parts usually have low stiffness, the cutting force will change along with the axial position, and it is very difficult to meet the requirement of shape accuracy by single machining. Therefore, on-machine measurement and compensating turning are used to control the shape errors caused by the fluctuation of cutting force and the change of stiffness. In this paper, on the basis of ultra precision diamond lathe, a contact measuring system with five DOFs is developed to achieve on-machine measurement of conformal thin-wall parts with high accuracy. According to high gradient surface, the optimizing algorithm is designed on the distribution of measuring points by using the data screening method. The influence rule of sampling frequency is analyzed on measuring errors, the best sampling frequency is found out based on planning algorithm, the effect of environmental factors and the fitting errors are controlled within lower range, and the measuring accuracy of conformal dome is greatly improved in the process of on-machine measurement. According to MgF2 conformal dome with high gradient, the compensating turning is implemented by using the designed on-machine measuring algorithm. The shape error is less than PV 0.8μm, greatly superior compared with PV 3μm before compensating turning, which verifies the correctness of measuring algorithm.
{"title":"Influence of measuring algorithm on shape accuracy in the compensating turning of high gradient thin-wall parts","authors":"Tao Wang, G. Wang, Dengchao Zhu, Shengyi Li","doi":"10.1117/12.2182649","DOIUrl":"https://doi.org/10.1117/12.2182649","url":null,"abstract":"In order to meet the requirement of aerodynamics, the infrared domes or windows with conformal and thin-wall structure becomes the development trend of high-speed aircrafts in the future. But these parts usually have low stiffness, the cutting force will change along with the axial position, and it is very difficult to meet the requirement of shape accuracy by single machining. Therefore, on-machine measurement and compensating turning are used to control the shape errors caused by the fluctuation of cutting force and the change of stiffness. In this paper, on the basis of ultra precision diamond lathe, a contact measuring system with five DOFs is developed to achieve on-machine measurement of conformal thin-wall parts with high accuracy. According to high gradient surface, the optimizing algorithm is designed on the distribution of measuring points by using the data screening method. The influence rule of sampling frequency is analyzed on measuring errors, the best sampling frequency is found out based on planning algorithm, the effect of environmental factors and the fitting errors are controlled within lower range, and the measuring accuracy of conformal dome is greatly improved in the process of on-machine measurement. According to MgF2 conformal dome with high gradient, the compensating turning is implemented by using the designed on-machine measuring algorithm. The shape error is less than PV 0.8μm, greatly superior compared with PV 3μm before compensating turning, which verifies the correctness of measuring algorithm.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"216 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114849585","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Wen Zhu, X. Cao, T. Fan, Shih-Bin Wu, Jie Li, Jie Yang
Laser tracker as a three-dimensional measuring instrument for large dimensions is widely used in the industrial measuring system, which is famous for its high precision, high efficiency, in site measurement and easy to be moved or installed, etc. In order to measure the large annular planes, especially non-continuous planes, a method with laser tracker on the basis of station-moving measurement is proposed. In this paper, the working principle of laser tracker system is described firstly, then the principle of the station-moving measurement is analyzed, finally according to the station-moving measurement principle experiment of the flatness measurement of a Φ5000mm round table is carried out, the result is compared with bridge-level, and feasibility of measuring flatness of large precision parts is validated by experiments and analysis results.
{"title":"Study on the station-moving measurement technology in the flatness measurement of large annular planes with a Laser Tracker","authors":"Wen Zhu, X. Cao, T. Fan, Shih-Bin Wu, Jie Li, Jie Yang","doi":"10.1117/12.2180817","DOIUrl":"https://doi.org/10.1117/12.2180817","url":null,"abstract":"Laser tracker as a three-dimensional measuring instrument for large dimensions is widely used in the industrial measuring system, which is famous for its high precision, high efficiency, in site measurement and easy to be moved or installed, etc. In order to measure the large annular planes, especially non-continuous planes, a method with laser tracker on the basis of station-moving measurement is proposed. In this paper, the working principle of laser tracker system is described firstly, then the principle of the station-moving measurement is analyzed, finally according to the station-moving measurement principle experiment of the flatness measurement of a Φ5000mm round table is carried out, the result is compared with bridge-level, and feasibility of measuring flatness of large precision parts is validated by experiments and analysis results.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"90 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126235784","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Chung, Wan-Jou Li, Sheng-Yuan Chen, Chi-Hou Hoi
This paper studied manufacturing resolutions of micro structures made by two photon polymerization (TPP) technology with different manufacturing parameters. The light source used for the TPP manufacturing system was a low-cost 532 nm Nd:YAG green laser, and the material used was commercial resin Photomer 3015. Two objective lenses, one with magnification of 100 times (100x) and numerical aperture (NA) of 1.3 and the other with 50x and NA0.8 were used in TPP production. The manufacturing resolution, which is also named as voxel size, changed with different manufacturing parameters such as laser power and exposure time. The measurement results of TPP structures manufactured with different manufacturing parameters indicated that the minimum line width produced by the 100x-NA1.3 lens could be reduced down to 67 nanometer (nm), which was quite good for TPP systems with low-cost Nd:YAG laser.
{"title":"Measurement of manufacturing resolution for two photon polymerization structures with different manufacturing parameters","authors":"T. Chung, Wan-Jou Li, Sheng-Yuan Chen, Chi-Hou Hoi","doi":"10.1117/12.2182421","DOIUrl":"https://doi.org/10.1117/12.2182421","url":null,"abstract":"This paper studied manufacturing resolutions of micro structures made by two photon polymerization (TPP) technology with different manufacturing parameters. The light source used for the TPP manufacturing system was a low-cost 532 nm Nd:YAG green laser, and the material used was commercial resin Photomer 3015. Two objective lenses, one with magnification of 100 times (100x) and numerical aperture (NA) of 1.3 and the other with 50x and NA0.8 were used in TPP production. The manufacturing resolution, which is also named as voxel size, changed with different manufacturing parameters such as laser power and exposure time. The measurement results of TPP structures manufactured with different manufacturing parameters indicated that the minimum line width produced by the 100x-NA1.3 lens could be reduced down to 67 nanometer (nm), which was quite good for TPP systems with low-cost Nd:YAG laser.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126450719","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
京公网安备 11010802042870号
京ICP备2023020795号-1
扫码关注我们
求助内容：
应助结果提醒方式：