The sensing performance of hydrogen gas sensor utilizing undoped-AlGaN/GaN HEMT

M. Mohamad, F. Mustafa, M. Abidin, S. Rahman, N. K. Al-Obaidi, A. M. Hashim, A. Aziz, M. Hashim
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引用次数: 11

Abstract

The response of Pt-circular Schottky diodes fabricated on undoped AlGaN/GaN high-electron-mobility-transistor (HEMT) structure to hydrogen gas at various temperatures, ranging from 25°C to 200°C has been investigated. A 5 nm-thick of catalytic Pt Shottky contact is formed by electron beam evaporation. Both forward and reverse currents of the device increase upon exposing to hydrogen gas. Although a slight change of forward and reverse current is obtained at room temperature upon exposure to hydrogen but both currents drastically increase with the increase of temperatures. The time-transient characteristics show the average current increment and decrement speed of 27.6 nA/sec and 17.6 nA/sec, respectively at constant forward bias of 1V and temperature of 200°C.
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利用未掺杂algan /GaN HEMT的氢气传感器的传感性能
研究了未掺杂AlGaN/GaN高电子迁移率晶体管(HEMT)结构的pt圆形肖特基二极管在25 ~ 200℃不同温度下对氢气的响应。通过电子束蒸发形成5 nm厚的催化Pt肖特基接触层。装置的正向和反向电流在暴露于氢气时都增加。虽然在室温下暴露于氢气时,正反电流有轻微的变化,但两种电流都随着温度的升高而急剧增加。时间-瞬态特性表明,在恒定正向偏置1V和温度为200℃时,平均电流增量和衰减速度分别为27.6 nA/sec和17.6 nA/sec。
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