M. Malak, K. Jefimovs, Irène Philipoussis, J. di Francesco, B. Guldimann, T. Scharf
{"title":"Functional micro-nano structures for on-chip fourier transform spectrometers","authors":"M. Malak, K. Jefimovs, Irène Philipoussis, J. di Francesco, B. Guldimann, T. Scharf","doi":"10.1109/DTIP.2014.7056640","DOIUrl":null,"url":null,"abstract":"Spectral analysis can be achieved using various optical microsystems. Amongst, we can cite: Fabry-Pérot and Michelson interferometers, Array Waveguide Grating and Standing wave Fourier Transform spectrometer. Recently, a study aiming miniaturization has been conducted on focal Plane Array Spectrometers (FPAS). Up to the authors' knowledge, this is the first report about a realization of a compact Fourier Transform optical spectrometer based on micro-nano structures, combining a polymer-based integrated optical circuit with movable external mirror for increased sampling and high precision.","PeriodicalId":268119,"journal":{"name":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DTIP.2014.7056640","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
Spectral analysis can be achieved using various optical microsystems. Amongst, we can cite: Fabry-Pérot and Michelson interferometers, Array Waveguide Grating and Standing wave Fourier Transform spectrometer. Recently, a study aiming miniaturization has been conducted on focal Plane Array Spectrometers (FPAS). Up to the authors' knowledge, this is the first report about a realization of a compact Fourier Transform optical spectrometer based on micro-nano structures, combining a polymer-based integrated optical circuit with movable external mirror for increased sampling and high precision.