Theoretical Consideration of Mismatch Compensation for MEMS Resonator Having Unaligned Principle Axes

Abstract

In this paper, a theoretical aspect of frequency and damping mismatch compensation in a MEMS rate integrating gyroscope (RIG) controlled by CW and CCW rotational modes is reported. The mismatches of a resonator could be compensated by the amplitudes and phases of the driving signals, even if the principle axes of stiffness and damping are not aligned to the X-Y coordinate. The proposed theoretical formula well consistent with the previously reported experimental results, as well as the numerical simulation.