{"title":"Experimental characterization of copper/low-k transmission line interconnects through microwave measurements","authors":"Jooyong Kim, D. Neikirk","doi":"10.1109/EPEP.2003.1250007","DOIUrl":null,"url":null,"abstract":"In this paper, we present the results of microwave measurements of copper/low-k transmission line interconnects. From measured S-parameters, the extracted R, L, and C for copper/low-k transmission lines are presented. In addition, the relative dielectric constant and loss tangent for various dielectric materials (SiO/sub 2/, low-k2 (Novellus Coral low-k dielectric), and low-k1 (JSR Corp. low-k dielectric)) up to 40 GHz are given.","PeriodicalId":254477,"journal":{"name":"Electrical Performance of Electrical Packaging (IEEE Cat. No. 03TH8710)","volume":"37 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-12-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Electrical Performance of Electrical Packaging (IEEE Cat. No. 03TH8710)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EPEP.2003.1250007","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
In this paper, we present the results of microwave measurements of copper/low-k transmission line interconnects. From measured S-parameters, the extracted R, L, and C for copper/low-k transmission lines are presented. In addition, the relative dielectric constant and loss tangent for various dielectric materials (SiO/sub 2/, low-k2 (Novellus Coral low-k dielectric), and low-k1 (JSR Corp. low-k dielectric)) up to 40 GHz are given.
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