Ryoongbin Lee, Junil Lee, Sangwan Kim, Kitae Lee, Sihyun Kim, Soyoun Kim, Yunho Choi, Byung-Gook Park
{"title":"Ge Condensation Process for High ON/OFF Ratio of SiGe Gate-All-Around Nanowire Tunnel Field-Effect Transistor","authors":"Ryoongbin Lee, Junil Lee, Sangwan Kim, Kitae Lee, Sihyun Kim, Soyoun Kim, Yunho Choi, Byung-Gook Park","doi":"10.23919/SNW.2019.8782957","DOIUrl":null,"url":null,"abstract":"In this study, we suggest an improvement method for high ON/OFF ratio and steep subthreshold swing (SS) which are suitable for gate-all-around (GAA) SiGe tunnel field-effect Transistor (TFET). Through technology-computer-aided-design (TCAD) simulation, the effect of Ge condensation on the device performance is examined. Furthermore, SiGe nanowire (NW) channel with high Ge ratio (over 70%) is successfully formed and the advantage of gradually-distributed Ge throughout the SiGe NW is also investigated.","PeriodicalId":170513,"journal":{"name":"2019 Silicon Nanoelectronics Workshop (SNW)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 Silicon Nanoelectronics Workshop (SNW)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/SNW.2019.8782957","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this study, we suggest an improvement method for high ON/OFF ratio and steep subthreshold swing (SS) which are suitable for gate-all-around (GAA) SiGe tunnel field-effect Transistor (TFET). Through technology-computer-aided-design (TCAD) simulation, the effect of Ge condensation on the device performance is examined. Furthermore, SiGe nanowire (NW) channel with high Ge ratio (over 70%) is successfully formed and the advantage of gradually-distributed Ge throughout the SiGe NW is also investigated.
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