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2019 Silicon Nanoelectronics Workshop (SNW)最新文献

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Si Electron Nano-Aspirator towards Emerging Hydro-Electronics 面向新兴水电子的硅电子纳米吸引器
Pub Date : 2019-06-09 DOI: 10.23919/SNW.2019.8782925
M. Razanoelina, H. Firdaus, Yasuo Takahashi, A. Fujiwara, Y. Ono
The electron nano-aspirator, which we have recently proposed and demonstrated, is a Si device with a T-shaped branch, and can enhance the MOS-transistor current by utilizing the hydrodynamic nature of electrons. Here, we present an investigation on the controllability of the device characteristics and discuss the performance improvement for the future development of low power circuits based on the electron hydrodynamics.
我们最近提出并演示的电子纳米吸引器是一种具有t形分支的Si器件,可以利用电子的流体动力学特性来增强mos晶体管的电流。在此,我们对器件特性的可控性进行了研究,并讨论了基于电子流体力学的低功耗电路未来发展的性能改进。
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引用次数: 1
Charge Effects on Semiconductor-Metal Phase Transition in Mono-layer MoTe2 电荷对单层MoTe2半导体-金属相变的影响
Pub Date : 2019-06-09 DOI: 10.23919/SNW.2019.8782941
Jixuan Wu, Xiaolei Ma, Jiezhi Chen, Xiangwei Jiang
To understand the charge effects on semiconductor-metal phase transition in monolayer MoTe2, the modulations of phase transition energies with electrons and holes doping are studied by using the first principle calculation. It is found that the charge will make the total energy of the distorted metal phase lower than the semiconductor phase. Also, the barrier of phase transition from the semiconductor phase to the distorted metal phase can be decreased. Our results can well explain the experimentally observed resistance switching in MoTe2 layer, indicating that the charge doping can be an effective approach to control the phase switching in MoTe2 layer.
为了了解电荷对单层MoTe2中半导体-金属相变的影响,利用第一性原理计算研究了电子和空穴掺杂对相变能量的调制。结果表明,电荷使畸变金属相的总能量低于半导体相的总能量。此外,从半导体相到扭曲金属相的相变屏障也可以降低。我们的研究结果可以很好地解释实验中观察到的MoTe2层的电阻开关,表明电荷掺杂可以作为一种有效的方法来控制MoTe2层的相开关。
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引用次数: 0
Atomistic Study of Transport Characteristics in Sub-1nm Ultra-narrow Molybdenum Disulfide (MoS2) Nanoribbon Field Effect Transistors 亚1nm超窄二硫化钼纳米带场效应晶体管输运特性的原子研究
Pub Date : 2019-06-09 DOI: 10.23919/SNW.2019.8782953
Fei Wang, Xiaolei Ma, Jixuan Wu, Jiezhi Chen, Xiangwei Jiang
In this work, nanoribbon field-effect-transistors (FETs) with an ultra-narrow monolayer MoS2 channel are investigated to understand the transverse scaling limitations of MoS2 FETs. It is observed that the bandgap of monolayer nanoribbon MoS2 can be largely affected by the passivation atoms, wherein OH passivation is more effective than H passivation. Then, impacts of passivation atoms on transport characteristics in MoS2 FETs with ultra-narrow MoS2 channel are calculated. Though higher Ion and lower Ioff can be obtained even in narrow MoS2 FETs with O/H passivation, Ioff is hard to be suppressed due to the contribution of edge states. Our results indicate that edge states engineering could be one key point to integrate MoS2 devices into CMOS technology.
在这项工作中,研究了具有超窄单层MoS2沟道的纳米带场效应晶体管(fet),以了解MoS2 fet的横向缩放限制。结果表明,钝化原子对单层二硫化钼的带隙影响较大,其中OH钝化比H钝化更有效。然后,计算了钝化原子对MoS2超窄通道场效应管输运特性的影响。虽然在O/H钝化的窄MoS2 fet中可以获得更高的离子和更低的Ioff,但由于边缘态的贡献,Ioff很难被抑制。我们的研究结果表明,边缘状态工程可能是将MoS2器件集成到CMOS技术中的一个关键点。
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引用次数: 0
Reduced RTN Amplitude and Single Trap induced Variation for Ferroelectric FinFET by Substrate Doping Optimization 基于衬底掺杂优化的铁电FinFET的RTN振幅减小和单阱诱导变化
Pub Date : 2019-06-09 DOI: 10.23919/SNW.2019.8782943
Zih-Tang Lin, V. Hu
In this paper, we investigate the impacts of single trap induced Random Telegraph Noise (RTN) on Ferroelectric FinFET (FE-FinFET) with P-type and N-type substrates respectively, compared to FinFET. The trap position dependent RTN amplitude $left(Delta mathbf{I}_{mathrm{d} /} / mathbf{I}_{mathrm{ds}}right)$ along the channel length and fin height directions are examined. For FE-FinFET and FinFET at $mathbf{V}_{mathbf{g s}}$= 0V, N-type substrate with smaller work function lowers the channel conduction band energy near the bottom of fin along the fin height direction. Therefore, the maximum electron current density occurs at the bottom of fin which becomes the most critical position introducing worst RTN amplitude for N-type substrate. However, for FE-FinFET and FinFET with P-type substrate, the worst RTN amplitude occurs at 0.5 fin height position. Therefore, along the fin height direction, the worst RTN amplitude occurs at different position for FE-FinFET/FinFET with N-type and P-type substrates respectively. Our results show that FE-FinFET exhibits smaller RTN amplitude than FinFET due to its smaller trap induced threshold voltage shift $left(Delta mathbf{V}_{mathrm{T}}right)$. Besides, for both FE-FinFET and FinFET, N-type substrate shows smaller RTN amplitude and RTN induced $Delta mathbf{V}_{mathbf{T}}$ variations than P-type substrate. In other words, RTN induced variations can be suppressed by substrate doping optimization for FE-FinFET and FinFET.
在本文中,我们研究了单阱诱导随机电报噪声(RTN)对p型和n型衬底铁电FinFET (FE-FinFET)的影响,并与FinFET进行了比较。沿通道长度和鳍高方向的陷阱位置依赖RTN振幅$left(Delta mathbf{I}_{mathrm{d} /} / mathbf{I}_{mathrm{ds}}right)$进行了检查。对于FE-FinFET和$mathbf{V}_{mathbf{g s}}$ = 0V时的FinFET,功函数较小的n型衬底沿翅片高度方向降低了靠近翅片底部的通道导带能量。因此,最大的电子电流密度出现在翅片的底部,这是最关键的位置,导致n型衬底的RTN振幅最差。然而,对于FE-FinFET和p型衬底的FinFET,最差的RTN振幅发生在0.5翅片高度位置。因此,沿翅片高度方向,FE-FinFET/ n型基片和p型基片的FinFET的RTN振幅最差的位置不同。我们的研究结果表明,FE-FinFET表现出比FinFET更小的RTN幅度,这是由于其更小的陷阱诱导阈值电压位移$left(Delta mathbf{V}_{mathrm{T}}right)$。此外,对于FE-FinFET和FinFET, n型衬底的RTN振幅和RTN诱导的$Delta mathbf{V}_{mathbf{T}}$变化都比p型衬底小。换句话说,可以通过优化FE-FinFET和FinFET的衬底掺杂来抑制RTN诱导的变化。
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引用次数: 2
Modeling of Lateral Migration Mechanism of Holes in 3D NAND Flash Memory Charge Trap Layer during Retention Operation 三维NAND闪存电荷阱层中孔在保留过程中横向迁移机制的建模
Pub Date : 2019-06-01 DOI: 10.23919/SNW.2019.8782975
Jaeyeol Park, Hyungcheol Shin
In this paper, we analyzed lateral migration mechanism of holes (LM) in 3D NAND Flash memory during retention operation. Retention characteristics were investigated using Technology Computer-Aided Design (TCAD) simulation and modeled using Weibull cumulative distribution function (WCD). Time-constant $(tau)$ at various temperatures were extracted through the modeled equation. Finally, the activation energy (Ea) of LM was extracted by applying to the Arrhenius equation.
本文分析了三维NAND闪存在保留操作过程中空穴(LM)的横向迁移机制。采用技术计算机辅助设计(TCAD)仿真研究了保留特性,并采用威布尔累积分布函数(WCD)建模。通过模型方程提取了不同温度下的时间常数$(tau)$。最后,应用Arrhenius方程提取了LM的活化能。
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引用次数: 3
[SNW 2019 Front cover] [SNW 2019封面]
Pub Date : 2019-06-01 DOI: 10.23919/snw.2019.8782968
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引用次数: 0
Comparative Study of High-k Dielectric on MoS2 Deposited by Plasma Enhanced ALD 等离子体增强ALD沉积MoS2高k介电介质的比较研究
Pub Date : 2019-06-01 DOI: 10.23919/SNW.2019.8782902
W. Chang, N. Okada, H. Asai, K. Fukuda, Mitsuhiro Okada, T. Endo, Y. Miyata, T. Irisawa
High-k dielectrics of Al2O3, HfO2 and ZrO2 have been directly deposited on MoS2 through plasma enhanced atomic layer deposition (PEALD). Among them, PEALD-ZrO2/MoS2 has shown the highest interfacial quality with high dielectric constant and sharp interface, characterized by CV, XPS and TEM measurements. Dual gate CVD-grown MoS2 MOSFETs using PEALD-ZrO2 as a top-gate dielectric has also been demonstrated.
采用等离子体增强原子层沉积(PEALD)的方法在MoS2上直接沉积了Al2O3、HfO2和ZrO2等高k介电体。其中,peal - zro2 /MoS2界面质量最高,具有较高的介电常数和清晰的界面。双栅cvd生长MoS2 mosfet使用PEALD-ZrO2作为顶栅电介质也已被证明。
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引用次数: 1
3D Heterogeneous Integration with 2D Materials 3D异质集成与2D材料
Pub Date : 2019-06-01 DOI: 10.23919/SNW.2019.8782932
C. McClellan, C. Bailey, I. Datye, A. Gabourie, R. Grady, K. Schauble, S. Vaziri, E. Pop
As traditional device scaling slows down, three-dimensional (3D) integrated circuits (ICs) are needed to continue Moore’s Law advancements. We show that two-dimensional (2D) semiconductors are promising for heterogeneously integrated 3D ICs owing to their atomically thin nature and unique processing, thermal, and device capabilities.
随着传统设备规模的放缓,需要三维集成电路(ic)来继续摩尔定律的进步。我们表明,二维(2D)半导体由于其原子薄的性质和独特的加工、热和器件能力,在异质集成3D集成电路中很有前景。
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引用次数: 0
Evaluation of Analog Circuit Performance for Ferroelectric SOI MOSFETs considering Interface Trap Charges and Gate Length Variations 考虑界面陷阱电荷和栅极长度变化的铁电SOI mosfet模拟电路性能评价
Pub Date : 2019-06-01 DOI: 10.23919/SNW.2019.8782942
Yi-chun Lu, V. Hu
The performance of ferroelectric SOI (FE-SOI) analog circuits considering the impact of interface trap charge (Nit) and gate length (Lg) variations are analysed for the first time. For FE-SOI MOSFETs, the discharging time (ts), on resistance (Ron) of switch circuit, and output current (Iout) of current mirror show superior immunity to Nit and Lg variations compared to the SOI counterparts. FE-SOI MOSFETs show significant improvements in discharging time (-78% and -31%) at Vdd=0.4V and 1V compared to SOI MOSFETs due to the negative capacitance induced voltage amplification and higher drive current. Besides, FE-SOI switch circuit exhibits lower Ron and better Ron flatness which suppresses distortion for audio and signal processing applications. FE-SOI current mirror with larger output resistance shows better current matching (smaller Iout/Iref) than SOI one, and comparable mirroring performance compared to the stacked SOI current mirror. Therefore, FE-SOI current mirror can significantly reduce the circuit complexity and area penalty while maintaining adequate mirroring accuracy.
首次分析了考虑界面阱电荷(Nit)和栅极长度(Lg)变化影响的铁电SOI (FE-SOI)模拟电路性能。对于FE-SOI mosfet,其放电时间(ts)、开关电路导通电阻(Ron)和电流镜输出电流(Iout)对Nit和Lg变化的抗扰性优于SOI mosfet。由于负电容感应电压放大和更高的驱动电流,FE-SOI mosfet在Vdd=0.4V和1V时的放电时间比SOI mosfet显著提高(-78%和-31%)。此外,FE-SOI开关电路具有更低的Ron和更好的Ron平坦度,可以抑制音频和信号处理应用中的失真。具有较大输出电阻的FE-SOI电流镜比SOI电流镜具有更好的电流匹配(Iout/Iref更小),与堆叠型SOI电流镜相比具有相当的镜像性能。因此,FE-SOI电流反射镜可以显著降低电路复杂性和面积损失,同时保持足够的镜像精度。
{"title":"Evaluation of Analog Circuit Performance for Ferroelectric SOI MOSFETs considering Interface Trap Charges and Gate Length Variations","authors":"Yi-chun Lu, V. Hu","doi":"10.23919/SNW.2019.8782942","DOIUrl":"https://doi.org/10.23919/SNW.2019.8782942","url":null,"abstract":"The performance of ferroelectric SOI (FE-SOI) analog circuits considering the impact of interface trap charge (N<inf>it</inf>) and gate length (L<inf>g</inf>) variations are analysed for the first time. For FE-SOI MOSFETs, the discharging time (t<inf>s</inf>), on resistance (R<inf>on</inf>) of switch circuit, and output current (I<inf>out</inf>) of current mirror show superior immunity to N<inf>it</inf> and L<inf>g</inf> variations compared to the SOI counterparts. FE-SOI MOSFETs show significant improvements in discharging time (-78% and -31%) at V<inf>dd</inf>=0.4V and 1V compared to SOI MOSFETs due to the negative capacitance induced voltage amplification and higher drive current. Besides, FE-SOI switch circuit exhibits lower R<inf>on</inf> and better R<inf>on</inf> flatness which suppresses distortion for audio and signal processing applications. FE-SOI current mirror with larger output resistance shows better current matching (smaller I<inf>out</inf>/I<inf>ref</inf>) than SOI one, and comparable mirroring performance compared to the stacked SOI current mirror. Therefore, FE-SOI current mirror can significantly reduce the circuit complexity and area penalty while maintaining adequate mirroring accuracy.","PeriodicalId":170513,"journal":{"name":"2019 Silicon Nanoelectronics Workshop (SNW)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129746296","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 8
Application of Extreme Value Theory to Statistical Analyses of Worst Case SRAM Data Retention Voltage 极值理论在SRAM数据保留电压最坏情况统计分析中的应用
Pub Date : 2019-06-01 DOI: 10.23919/SNW.2019.8782900
T. Mizutani, K. Takeuchi, T. Saraya, M. Kobayashi, T. Hiramoto
Extreme value theory was applied to the estimation of worst case SRAM data retention voltage (DRV). It was found that the worst case DRV follows Gumbel distributions, and can be estimated by measuring not all, but only the worst case DRV of several SRAM arrays.
将极值理论应用于SRAM最坏情况下的数据保持电压估计。研究发现,最坏情况下的DRV遵循Gumbel分布,可以通过测量几个SRAM阵列的最坏情况DRV而不是全部来估计。
{"title":"Application of Extreme Value Theory to Statistical Analyses of Worst Case SRAM Data Retention Voltage","authors":"T. Mizutani, K. Takeuchi, T. Saraya, M. Kobayashi, T. Hiramoto","doi":"10.23919/SNW.2019.8782900","DOIUrl":"https://doi.org/10.23919/SNW.2019.8782900","url":null,"abstract":"Extreme value theory was applied to the estimation of worst case SRAM data retention voltage (DRV). It was found that the worst case DRV follows Gumbel distributions, and can be estimated by measuring not all, but only the worst case DRV of several SRAM arrays.","PeriodicalId":170513,"journal":{"name":"2019 Silicon Nanoelectronics Workshop (SNW)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121544316","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
期刊
2019 Silicon Nanoelectronics Workshop (SNW)
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