Tomohiro Akazawa, D. Wu, Kai Sumita, N. Sekine, M. Okano, K. Toprasertpong, Shinichi Takagi, M. Takenaka
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引用次数: 1
Abstract
We proposed a Si/III-V hybrid waveguide photodetector consisting of an ultrathin InGaAs membrane and Si slot waveguide, enabling low capacitance and high responsivity simultaneously. The strong optical confinement in a Si slot waveguide enhanced optical absorption in the InGaAs membrane. As a result, we successfully demonstrated high responsivity of 1 A/W and sufficiently small capacitance of 1.9 fF to realize a receiver-less (TIA-less) system.
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