Continuous large area oxide printing from liquid metals

M. Vong, Minsik Kong, Unyong Jeong, M. Dickey
{"title":"Continuous large area oxide printing from liquid metals","authors":"M. Vong, Minsik Kong, Unyong Jeong, M. Dickey","doi":"10.1117/12.2657566","DOIUrl":null,"url":null,"abstract":"Amorphous metal oxides (AMO) are a class of semiconducting materials that show promising application in optoelectronics because of their high carrier mobility and optical transparency. By alloying with other metallic species and regulating the oxygen vacancies, the carrier mobility, and the optical bandgap energy of AMOs can be modified. This customizability not only broadens the operating window of AMOs in optoelectronics but also further enables other applications, such as digital memory devices and thin-film-transistors. Typically, AMO thin films are obtained by conventional chemical or physical vapor deposition; however, these processes generally require undesirable toxic gas precursors, a vacuum environment, and a long processing time. Gallium-based liquid metals (LMs) – a class of metals that exist as liquid at or near room temperature – naturally forms an ultrathin layer of AMO (~3nm) on their surface under ambient conditions. Herein, we propose a method to harness this feature to continuously deposit gallium oxide (GaOx) and gallium indium oxide (GaInOx) traces with their host LMs at or near ambient conditions.","PeriodicalId":212235,"journal":{"name":"Advanced Lithography","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2023-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advanced Lithography","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2657566","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

Abstract

Amorphous metal oxides (AMO) are a class of semiconducting materials that show promising application in optoelectronics because of their high carrier mobility and optical transparency. By alloying with other metallic species and regulating the oxygen vacancies, the carrier mobility, and the optical bandgap energy of AMOs can be modified. This customizability not only broadens the operating window of AMOs in optoelectronics but also further enables other applications, such as digital memory devices and thin-film-transistors. Typically, AMO thin films are obtained by conventional chemical or physical vapor deposition; however, these processes generally require undesirable toxic gas precursors, a vacuum environment, and a long processing time. Gallium-based liquid metals (LMs) – a class of metals that exist as liquid at or near room temperature – naturally forms an ultrathin layer of AMO (~3nm) on their surface under ambient conditions. Herein, we propose a method to harness this feature to continuously deposit gallium oxide (GaOx) and gallium indium oxide (GaInOx) traces with their host LMs at or near ambient conditions.
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
液态金属连续大面积氧化印刷
非晶金属氧化物(AMO)是一类具有高载流子迁移率和光学透明性的半导体材料,在光电子学领域具有广阔的应用前景。通过与其他金属合金化和调节氧空位,可以改变AMOs的载流子迁移率和光学带隙能。这种可定制性不仅拓宽了AMOs在光电子学中的操作窗口,而且还进一步实现了其他应用,如数字存储器件和薄膜晶体管。通常,AMO薄膜是通过常规的化学或物理气相沉积获得的;然而,这些工艺通常需要不良的有毒气体前体,真空环境和较长的处理时间。镓基液态金属(LMs)是一类在室温或接近室温下以液态存在的金属,在环境条件下,它们的表面会自然形成一层超薄的AMO (~3nm)。在此,我们提出了一种方法来利用这一特性在环境条件下或附近连续沉积氧化镓(GaOx)和氧化镓铟(GaInOx)的迹线及其宿主lm。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Considerations in the design of photoacid generators Predicting the critical features of the chemically-amplified resist profile based on machine learning Application of double exposure technique in plasmonic lithography The damage control of sub layer while ion-driven etching with vertical carbon profile implemented Ultra-high carbon fullerene-based spin-on-carbon hardmasks
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1