{"title":"Localized surface plasmon-enhanced photodetection in β-Ga2O3 solar-blind photodetector with Sn nanoparticles array","authors":"Sishuo Yang, L. Qian","doi":"10.1109/EDTM53872.2022.9797973","DOIUrl":null,"url":null,"abstract":"Surface plasma is effective to enhance the light absorption of semiconductor and accordingly the photodetection performance of related photodetectors, but its application in the region of deep-ultraviolet light still face severe challenges. Herein, a β-Ga2O3 solar-blind photodetector with Sn nanoparticles array is fabricated. Due to the surface plasma effect of Sn nanoparticles with suitable sizes, the photodetection characteristics of β-Ga2O3 solar-blind photodetector, including light to dark current ratio, responsivity and detectivity, have been successfully doubled, resulting in ultrahigh sensitivity. This work provides an alternative technique to realize low-cost, high-performance and solar-blind photodetectors.","PeriodicalId":158478,"journal":{"name":"2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 6th IEEE Electron Devices Technology & Manufacturing Conference (EDTM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EDTM53872.2022.9797973","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Surface plasma is effective to enhance the light absorption of semiconductor and accordingly the photodetection performance of related photodetectors, but its application in the region of deep-ultraviolet light still face severe challenges. Herein, a β-Ga2O3 solar-blind photodetector with Sn nanoparticles array is fabricated. Due to the surface plasma effect of Sn nanoparticles with suitable sizes, the photodetection characteristics of β-Ga2O3 solar-blind photodetector, including light to dark current ratio, responsivity and detectivity, have been successfully doubled, resulting in ultrahigh sensitivity. This work provides an alternative technique to realize low-cost, high-performance and solar-blind photodetectors.