Analyses of thermo-mechanical reliability issues for power modules designed in planar technology

R. Dudek, R. Doring, M. Hildebrandt, S. Rzepka, S. Stegmeier, S. Kiefl, Volkmar Sommer, G. Mitic, K. Weidner
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引用次数: 8

Abstract

Theoretical analyses on the thermo-mechanical behavior of power modules designed in a new buildup and interconnection technology based on silver sintering and electroplated copper interconnects have been made. The characteristic difference to other technologies can be seen in the replacement of bonding wires by planar copper interconnects and the high voltage applicability of the resulting modules. A high voltage and temperature resistant polymeric foil provides the insulation in this high voltage planar interconnect technology. Electrical connection is made by structured electro-deposited copper structures, which allow additional heat spreading from top of the dies. This interconnection technology is raising new questions concerning the constitutive behavior of the materials involved in the power stack as well as the closely linked questions concerning their thermo-mechanical reliability. Investigations on characteristics of dielectric materials and copper plated interconnects are reported. For the latter, a significant dependence on microstructure is seen. FE-analyses were made to study the thermal and mechanical loadings. Both passive and power cycling were investigated for a prototype converter module substrate designed by HVPT. Transient power cycling induced loading was studied using electric-thermal-mechanical coupling. Significant change in the potential failure modes of such an assembly are to be expected, in particular metallization delamination failure at different interfaces can occur.
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平面设计电源模块热机械可靠性问题分析
本文对采用银烧结和镀铜互连新工艺设计的电源模块的热力学行为进行了理论分析。与其他技术的特性差异体现在用平面铜互连线取代键合线以及由此产生的模块的高压适用性。在这种高压平面互连技术中,一个耐高压和耐温度的聚合物箔提供了绝缘。电连接是由结构化的电沉积铜结构,这允许额外的热量从模具的顶部扩散。这种互连技术提出了有关电源堆材料本构行为的新问题,以及与之密切相关的热-机械可靠性问题。对介电材料和镀铜互连的特性进行了研究。对于后者,可以看到对微观结构的显著依赖。fe分析研究了热载荷和机械载荷。对HVPT设计的原型变换器模块衬底进行了无源和功率循环研究。采用电-热-力耦合的方法研究了瞬态功率循环诱导加载。预计这种装配的潜在失效模式会发生重大变化,特别是在不同界面上可能发生金属化分层失效。
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