{"title":"Formation of YBa/sub 2/Cu/sub 3/O/sub 7-x//MgO and YBa/sub 2/Cu/sub 3/O/sub 7-x//Si thin film structure by laser pulse crystallisation and annealing","authors":"B.K. Kotlyarchuk, V. Savchuk","doi":"10.1109/ASDAM.2002.1088470","DOIUrl":null,"url":null,"abstract":"The results of the theoretical and experimental study of laser pulse crystallisation and annealing of the YBa/sub 2/Cu/sub 3/O/sub 7-x/ high-temperature superconducting amorphous layers are presented in the paper. It is determined that for each given film thickness and type of substrate there exists a optimal pressure of oxygen, laser pulse energy density, its duration and wavelength at which the conditions Of thermodynamic stability of the film compound is preserved.","PeriodicalId":179900,"journal":{"name":"The Fourth International Conference on Advanced Semiconductor Devices and Microsystem","volume":"103 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2002-12-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"The Fourth International Conference on Advanced Semiconductor Devices and Microsystem","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASDAM.2002.1088470","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The results of the theoretical and experimental study of laser pulse crystallisation and annealing of the YBa/sub 2/Cu/sub 3/O/sub 7-x/ high-temperature superconducting amorphous layers are presented in the paper. It is determined that for each given film thickness and type of substrate there exists a optimal pressure of oxygen, laser pulse energy density, its duration and wavelength at which the conditions Of thermodynamic stability of the film compound is preserved.
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