L. R. Sloan, C. Sullivan, C. Tigges, C. Sandoval, D. Palmer, S. Hietala, T. Christenson, C. Dyck, T. A. Plut, G. R. Schuster
{"title":"RF micromechanical switches that can be post processed on commercial MMICs","authors":"L. R. Sloan, C. Sullivan, C. Tigges, C. Sandoval, D. Palmer, S. Hietala, T. Christenson, C. Dyck, T. A. Plut, G. R. Schuster","doi":"10.1109/ECTC.2001.927743","DOIUrl":null,"url":null,"abstract":"The application need for and specification of RF micro-electro-mechanical (MEM) switches are discussed. The design, low temperature processing, and RF characteristics of a coplanar waveguide MEMs switch are presented. This switch can be integrated onto previously fabricated MMICs or transistor chips. These switches demonstrate 0.2 dB loss while in the \"on\" state (closed), need approximately 10 volts to operate, and can carry more than 200 mW RF.","PeriodicalId":340217,"journal":{"name":"2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220)","volume":"77 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2001 Proceedings. 51st Electronic Components and Technology Conference (Cat. No.01CH37220)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ECTC.2001.927743","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
The application need for and specification of RF micro-electro-mechanical (MEM) switches are discussed. The design, low temperature processing, and RF characteristics of a coplanar waveguide MEMs switch are presented. This switch can be integrated onto previously fabricated MMICs or transistor chips. These switches demonstrate 0.2 dB loss while in the "on" state (closed), need approximately 10 volts to operate, and can carry more than 200 mW RF.
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