{"title":"Relation between reliability and yield of ICs based on discrete defect distribution model","authors":"Tianxu Zhao, Y. Hao, Peijun Ma, Ta-Te Chen","doi":"10.1109/DFTVS.2001.966751","DOIUrl":null,"url":null,"abstract":"Yield and reliability are two important factors affecting the development of semiconductor manufacturing. It is an important problem, how to express the relation between yield and reliability. In this paper, a model of the relation is given between yield and reliability based on a discrete yield model, many factors are considered in this model, such as the line width, the spacing between the lines as well as the distribution of the defect size and so on. Finally, the validity of this model is shown by simulation.","PeriodicalId":187031,"journal":{"name":"Proceedings 2001 IEEE International Symposium on Defect and Fault Tolerance in VLSI Systems","volume":"24 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-10-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings 2001 IEEE International Symposium on Defect and Fault Tolerance in VLSI Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DFTVS.2001.966751","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Yield and reliability are two important factors affecting the development of semiconductor manufacturing. It is an important problem, how to express the relation between yield and reliability. In this paper, a model of the relation is given between yield and reliability based on a discrete yield model, many factors are considered in this model, such as the line width, the spacing between the lines as well as the distribution of the defect size and so on. Finally, the validity of this model is shown by simulation.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
