{"title":"Status of highly accurate flatness metrology at PTB for optics up to 1.5 meters in diameter","authors":"G. Ehret, Jan Spichtinger, M. Schulz","doi":"10.1117/12.2602680","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":298149,"journal":{"name":"Optical Metrology and Inspection for Industrial Applications VIII","volume":"352 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Metrology and Inspection for Industrial Applications VIII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2602680","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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