Thermal assessment of RF integrated LTCC front end module (FEM)

V. Chiriac, T. Lee
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引用次数: 6

Abstract

The thermal performance of Front End Module (FEM) incorporating Low Temperature Co-fired Ceramic (LTCC) substrate is investigated. An Infrared Microscope System was used to measure device surface temperature with both RF and DC power at various duty cycles (25 to 100%). The maximum junction temperature (/spl sim/112/spl deg/C) occurs at the second stage. By powering the module with DC only, he comparison between numerical and experimental data indicates good agreement, with less than 10% difference in the peak temperature values. When replacing the common 2-layer organic substrate with a 14-layer LTCC substrate and silver paste metallization, the peak junction temperature reaches 130.1/spl deg/C, /spl sim/51% higher than before. However, by increasing the silver paste thermal conductivity from 90 to 350 W/mK, a significant drop in peak temperatures occurs, indicating the impact on module's overall thermal performance. The top metal layer thickness (10 vs. 30 microns) only contributed to 5-8% changes in peak junction temperature. An improved FEM design incorporates a higher thermal conductivity silver paste material (300 W/mK) with new thermal via array structure (25 vias, 150 microns in diameter each) in the LTCC substrate. The module junction temperature reaches 96/spl deg/C (based on 25/spl deg/C reference temperature, 100% duty cycle), corresponding to a junction-to-substrate (R/sub js/) thermal resistance of 14/spl deg/C/W. Further study reveals that 20% voiding placed at the die center has no impact on FEM thermal performance, while the voiding placed at the die comer (under the heat dissipating stages) increases the stage peak temperature significantly by more than 40/spl deg/C. Last part of the study focuses on design optimization: two particular designs provide the optimal thermal performance when reducing the thermal via number/costs by almost 40%.
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射频集成LTCC前端模块(FEM)热评估
研究了低温共烧陶瓷(LTCC)衬底前端模块(FEM)的热性能。红外显微镜系统用于测量射频和直流电源在不同占空比(25%至100%)下的器件表面温度。最大结温(/spl sim/112/spl℃)出现在第二阶段。通过只给模块供电,数值和实验数据之间的比较表明了良好的一致性,峰值温度值的差异小于10%。用14层LTCC衬底和银膏状金属化代替普通的2层有机衬底时,结温峰值达到130.1/spl℃,比以前提高了51%。然而,通过将银浆导热系数从90 W/mK增加到350 W/mK,峰值温度显著下降,表明对模块整体热性能的影响。顶部金属层厚度(10微米对30微米)仅对峰值结温度的变化有5-8%的贡献。改进的FEM设计在LTCC衬底中采用了导热系数更高的银浆材料(300 W/mK)和新的热通孔阵列结构(25个通孔,每个直径150微米)。模块结温达到96/spl℃(基于25/spl℃参考温度,100%占空比),对应结基(R/sub / js/)热阻为14/spl℃/C/W。进一步研究表明,在模中心放置20%的空腔对有限元热性能没有影响,而在模角(散热阶段下)放置空腔可显著提高阶段峰值温度40/spl℃以上。研究的最后一部分侧重于设计优化:两种特殊的设计在减少热通道数量/成本近40%的情况下提供了最佳的热性能。
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